Fabrication of diffractive optical elements with grayscale photo-lithography

Wan Chin Kim, Myung Bok Lee, Jin Seung Sohn, Eun Hyung Cho, Chan Young Yoon, No Cheol Park, Young Pil Park

Research output: Contribution to journalConference article

Abstract

We have developed diffractive optical element (DOE) to compensate chromatic aberration happened in aspheric lens surfaces in micro optical system. The DOE was generated with grayscale lithography using high-energy-beam-sensitive (HEBS)-glass, and we finally get DOEs having 4levels and 8levels through this fabrication.

Original languageEnglish
Pages (from-to)686-696
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5380
DOIs
Publication statusPublished - 2004 Dec 20
EventOptical Data Storage 2004 - Monterey, CA, United States
Duration: 2004 Apr 182004 Apr 21

Fingerprint

Diffractive optical elements
Diffractive Optical Elements
Photolithography
Lithography
aberration
Fabrication
lithography
lenses
fabrication
glass
Aberrations
Aberration
Optical systems
Optical System
Lens
High Energy
Lenses
Glass
energy

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Kim, Wan Chin ; Lee, Myung Bok ; Sohn, Jin Seung ; Cho, Eun Hyung ; Yoon, Chan Young ; Park, No Cheol ; Park, Young Pil. / Fabrication of diffractive optical elements with grayscale photo-lithography. In: Proceedings of SPIE - The International Society for Optical Engineering. 2004 ; Vol. 5380. pp. 686-696.
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Fabrication of diffractive optical elements with grayscale photo-lithography. / Kim, Wan Chin; Lee, Myung Bok; Sohn, Jin Seung; Cho, Eun Hyung; Yoon, Chan Young; Park, No Cheol; Park, Young Pil.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5380, 20.12.2004, p. 686-696.

Research output: Contribution to journalConference article

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AU - Park, No Cheol

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