Fabrication of electrode Pt nanotubes for semiconductor capacitors

B. I. Seo, U. A. Shaislamov, S. W. Kim, H. K. Kim, S. K. Hong, B. Yang

Research output: Contribution to journalArticlepeer-review


Template-wetting process was used to fabricate Pt electrode nanotubes for the further application in 3D nanotube capacitors. Anodic alumina oxide (AAO) was used as a template, which can be fabricated by means of two-step anodization process. After the wetting process, released Pt nanotubes have been obtained by selective etching of the template using KOH solution. Pt nanotubes formation and tube walls morphology were investigated by FE-SEM technique. Furnace annealing (FA) effects at temperatures ranging from 200 to 600 °C with 100oC step on nucleation and crystal growth condition of Pt nanotubes have been examined. Crystallization of the Pt nanotube inside the template has been examined by step-by-step annealing at different temperatures, and confirmed by XRD.

Original languageEnglish
Pages (from-to)279-282
Number of pages4
JournalPhysica E: Low-Dimensional Systems and Nanostructures
Issue number1-2
Publication statusPublished - 2007 Mar

Bibliographical note

Funding Information:
This work was supported by the Ministry of Commerce, Industry and Energy in Korea under the System IC 2010 Project.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics


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