Fabrication of electrode Pt nanotubes for semiconductor capacitors

B. I. Seo; U. A. Shaislamov; S. W. Kim; H. K. Kim; S. K. Hong; B. Yang

doi:10.1016/j.physe.2006.07.033

Fabrication of electrode Pt nanotubes for semiconductor capacitors

B. I. Seo, U. A. Shaislamov, S. W. Kim, H. K. Kim, S. K. Hong, B. Yang

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Template-wetting process was used to fabricate Pt electrode nanotubes for the further application in 3D nanotube capacitors. Anodic alumina oxide (AAO) was used as a template, which can be fabricated by means of two-step anodization process. After the wetting process, released Pt nanotubes have been obtained by selective etching of the template using KOH solution. Pt nanotubes formation and tube walls morphology were investigated by FE-SEM technique. Furnace annealing (FA) effects at temperatures ranging from 200 to 600 °C with 100^oC step on nucleation and crystal growth condition of Pt nanotubes have been examined. Crystallization of the Pt nanotube inside the template has been examined by step-by-step annealing at different temperatures, and confirmed by XRD.

Original language	English
Pages (from-to)	279-282
Number of pages	4
Journal	Physica E: Low-Dimensional Systems and Nanostructures
Volume	37
Issue number	1-2
DOIs	https://doi.org/10.1016/j.physe.2006.07.033
Publication status	Published - 2007 Mar

Bibliographical note

Funding Information:
This work was supported by the Ministry of Commerce, Industry and Energy in Korea under the System IC 2010 Project.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics

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10.1016/j.physe.2006.07.033

Cite this

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title = "Fabrication of electrode Pt nanotubes for semiconductor capacitors",

abstract = "Template-wetting process was used to fabricate Pt electrode nanotubes for the further application in 3D nanotube capacitors. Anodic alumina oxide (AAO) was used as a template, which can be fabricated by means of two-step anodization process. After the wetting process, released Pt nanotubes have been obtained by selective etching of the template using KOH solution. Pt nanotubes formation and tube walls morphology were investigated by FE-SEM technique. Furnace annealing (FA) effects at temperatures ranging from 200 to 600 °C with 100oC step on nucleation and crystal growth condition of Pt nanotubes have been examined. Crystallization of the Pt nanotube inside the template has been examined by step-by-step annealing at different temperatures, and confirmed by XRD.",

author = "Seo, {B. I.} and Shaislamov, {U. A.} and Kim, {S. W.} and Kim, {H. K.} and Hong, {S. K.} and B. Yang",

note = "Funding Information: This work was supported by the Ministry of Commerce, Industry and Energy in Korea under the System IC 2010 Project.",

year = "2007",

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doi = "10.1016/j.physe.2006.07.033",

language = "English",

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T1 - Fabrication of electrode Pt nanotubes for semiconductor capacitors

AU - Seo, B. I.

AU - Shaislamov, U. A.

AU - Kim, S. W.

AU - Kim, H. K.

AU - Hong, S. K.

AU - Yang, B.

N1 - Funding Information: This work was supported by the Ministry of Commerce, Industry and Energy in Korea under the System IC 2010 Project.

PY - 2007/3

Y1 - 2007/3

N2 - Template-wetting process was used to fabricate Pt electrode nanotubes for the further application in 3D nanotube capacitors. Anodic alumina oxide (AAO) was used as a template, which can be fabricated by means of two-step anodization process. After the wetting process, released Pt nanotubes have been obtained by selective etching of the template using KOH solution. Pt nanotubes formation and tube walls morphology were investigated by FE-SEM technique. Furnace annealing (FA) effects at temperatures ranging from 200 to 600 °C with 100oC step on nucleation and crystal growth condition of Pt nanotubes have been examined. Crystallization of the Pt nanotube inside the template has been examined by step-by-step annealing at different temperatures, and confirmed by XRD.

AB - Template-wetting process was used to fabricate Pt electrode nanotubes for the further application in 3D nanotube capacitors. Anodic alumina oxide (AAO) was used as a template, which can be fabricated by means of two-step anodization process. After the wetting process, released Pt nanotubes have been obtained by selective etching of the template using KOH solution. Pt nanotubes formation and tube walls morphology were investigated by FE-SEM technique. Furnace annealing (FA) effects at temperatures ranging from 200 to 600 °C with 100oC step on nucleation and crystal growth condition of Pt nanotubes have been examined. Crystallization of the Pt nanotube inside the template has been examined by step-by-step annealing at different temperatures, and confirmed by XRD.

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ER -

Fabrication of electrode Pt nanotubes for semiconductor capacitors

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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