Fabrication of gold-doped crystalline-silicon nanomembrane-based wearable temperature sensor

Kyowon Kang, Mingyu Sang, Baoxing Xu, Ki Jun Yu

Research output: Contribution to journalArticlepeer-review


Wearable temperature sensors with high thermal sensitivity are required for precise and continuous body temperature monitoring. Here, we present a protocol for fabricating a thin, stretchable, and ultrahigh thermal-sensitive wearable sensor based on gold-doped crystalline-silicon nanomembrane (SiNM). We provide detailed steps of gold doping technique to SiNM and fabrication processes for gold-doped crystalline-SiNM based wearable temperature sensor. For complete details on the use and execution of this protocol, please refer to Sang et al. (2022).1

Original languageEnglish
Article number101925
JournalSTAR Protocols
Issue number1
Publication statusPublished - 2023 Mar 17

Bibliographical note

Funding Information:
This work acknowledges the support received from the National Research Foundation of Korea (Grant Nos. NRF-2018M3A7B4071109 , NRF-2019R1A2C2086085 , and NRF-2021R1A4A1031437 ) and the KIST Institutional Program (Project No. 2E31603-22-140 ).

Publisher Copyright:
© 2022 The Authors

All Science Journal Classification (ASJC) codes

  • Neuroscience(all)
  • Biochemistry, Genetics and Molecular Biology(all)
  • Immunology and Microbiology(all)


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