Fabrication of gold-doped crystalline-silicon nanomembrane-based wearable temperature sensor

Kyowon Kang; Mingyu Sang; Baoxing Xu; Ki Jun Yu

doi:10.1016/j.xpro.2022.101925

Fabrication of gold-doped crystalline-silicon nanomembrane-based wearable temperature sensor

Kyowon Kang, Mingyu Sang, Baoxing Xu, Ki Jun Yu

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Wearable temperature sensors with high thermal sensitivity are required for precise and continuous body temperature monitoring. Here, we present a protocol for fabricating a thin, stretchable, and ultrahigh thermal-sensitive wearable sensor based on gold-doped crystalline-silicon nanomembrane (SiNM). We provide detailed steps of gold doping technique to SiNM and fabrication processes for gold-doped crystalline-SiNM based wearable temperature sensor. For complete details on the use and execution of this protocol, please refer to Sang et al. (2022).¹

Original language	English
Article number	101925
Journal	STAR Protocols
Volume	4
Issue number	1
DOIs	https://doi.org/10.1016/j.xpro.2022.101925
Publication status	Published - 2023 Mar 17

Bibliographical note

Funding Information:
This work acknowledges the support received from the National Research Foundation of Korea (Grant Nos. NRF-2018M3A7B4071109 , NRF-2019R1A2C2086085 , and NRF-2021R1A4A1031437 ) and the KIST Institutional Program (Project No. 2E31603-22-140 ).

Publisher Copyright:
© 2022 The Authors

All Science Journal Classification (ASJC) codes

Neuroscience(all)
Biochemistry, Genetics and Molecular Biology(all)
Immunology and Microbiology(all)

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10.1016/j.xpro.2022.101925

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title = "Fabrication of gold-doped crystalline-silicon nanomembrane-based wearable temperature sensor",

abstract = "Wearable temperature sensors with high thermal sensitivity are required for precise and continuous body temperature monitoring. Here, we present a protocol for fabricating a thin, stretchable, and ultrahigh thermal-sensitive wearable sensor based on gold-doped crystalline-silicon nanomembrane (SiNM). We provide detailed steps of gold doping technique to SiNM and fabrication processes for gold-doped crystalline-SiNM based wearable temperature sensor. For complete details on the use and execution of this protocol, please refer to Sang et al. (2022).1",

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AU - Xu, Baoxing

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Y1 - 2023/3/17

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AB - Wearable temperature sensors with high thermal sensitivity are required for precise and continuous body temperature monitoring. Here, we present a protocol for fabricating a thin, stretchable, and ultrahigh thermal-sensitive wearable sensor based on gold-doped crystalline-silicon nanomembrane (SiNM). We provide detailed steps of gold doping technique to SiNM and fabrication processes for gold-doped crystalline-SiNM based wearable temperature sensor. For complete details on the use and execution of this protocol, please refer to Sang et al. (2022).1

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Fabrication of gold-doped crystalline-silicon nanomembrane-based wearable temperature sensor

Abstract

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