Fabrication of inorganic-organic hybrid films for optical waveguide

Sunho Jeong, Joo Ho Moon

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Inorganic-organic hybrid guiding and buffer layers for optical waveguides were synthesized by the sol-gel process. An acid-catalyzed solution of 3-(trimethoxysilyl)propylmethacrylate and tetraethylorthosilicate was used as a precursor to produce thick films by spin-coating. Incorporation of a UV-sensitive functional group leads to the fabrication of the photo-patternable guiding layer. High-resolution patterned films with 8 μm linewidth were obtained using a conventional photo-lithography. Furthermore, the amount of phenyltrimethoxysilane added as a refractive index modifier varied in order to control the refractive index of the underlying buffer layer. The refractive index variations and structural changes of these inorganic-organic hybrid films as a function of the processing conditions were analyzed using the prism coupling technique and a Fourier transform infrared spectrometer. We have produced optically transparent films at above 500 nm with a propagation loss of 0.84 and 1.49 dB/cm at 1310 and 1550 nm, respectively.

Original languageEnglish
Pages (from-to)3530-3535
Number of pages6
JournalJournal of Non-Crystalline Solids
Volume351
Issue number43-45
DOIs
Publication statusPublished - 2005 Nov 1

Fingerprint

Optical waveguides
optical waveguides
Refractive index
Buffer layers
refractivity
Fabrication
fabrication
buffers
Infrared spectrometers
infrared spectrometers
Spin coating
sol-gel processes
Prisms
Thick films
Linewidth
Lithography
Functional groups
Sol-gel process
prisms
thick films

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

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Fabrication of inorganic-organic hybrid films for optical waveguide. / Jeong, Sunho; Moon, Joo Ho.

In: Journal of Non-Crystalline Solids, Vol. 351, No. 43-45, 01.11.2005, p. 3530-3535.

Research output: Contribution to journalArticle

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AU - Jeong, Sunho

AU - Moon, Joo Ho

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AB - Inorganic-organic hybrid guiding and buffer layers for optical waveguides were synthesized by the sol-gel process. An acid-catalyzed solution of 3-(trimethoxysilyl)propylmethacrylate and tetraethylorthosilicate was used as a precursor to produce thick films by spin-coating. Incorporation of a UV-sensitive functional group leads to the fabrication of the photo-patternable guiding layer. High-resolution patterned films with 8 μm linewidth were obtained using a conventional photo-lithography. Furthermore, the amount of phenyltrimethoxysilane added as a refractive index modifier varied in order to control the refractive index of the underlying buffer layer. The refractive index variations and structural changes of these inorganic-organic hybrid films as a function of the processing conditions were analyzed using the prism coupling technique and a Fourier transform infrared spectrometer. We have produced optically transparent films at above 500 nm with a propagation loss of 0.84 and 1.49 dB/cm at 1310 and 1550 nm, respectively.

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