Abstract
Inorganic-organic hybrid guiding and buffer layers for optical waveguides were synthesized by the sol-gel process. An acid-catalyzed solution of 3-(trimethoxysilyl)propylmethacrylate and tetraethylorthosilicate was used as a precursor to produce thick films by spin-coating. Incorporation of a UV-sensitive functional group leads to the fabrication of the photo-patternable guiding layer. High-resolution patterned films with 8 μm linewidth were obtained using a conventional photo-lithography. Furthermore, the amount of phenyltrimethoxysilane added as a refractive index modifier varied in order to control the refractive index of the underlying buffer layer. The refractive index variations and structural changes of these inorganic-organic hybrid films as a function of the processing conditions were analyzed using the prism coupling technique and a Fourier transform infrared spectrometer. We have produced optically transparent films at above 500 nm with a propagation loss of 0.84 and 1.49 dB/cm at 1310 and 1550 nm, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 3530-3535 |
| Number of pages | 6 |
| Journal | Journal of Non-Crystalline Solids |
| Volume | 351 |
| Issue number | 43-45 |
| DOIs | |
| Publication status | Published - 2005 Nov 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Condensed Matter Physics
- Materials Chemistry
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Fabrication of inorganic-organic hybrid films for optical waveguide. / Jeong, Sunho; Moon, Jooho.
In: Journal of Non-Crystalline Solids, Vol. 351, No. 43-45, 01.11.2005, p. 3530-3535.Research output: Contribution to journal › Article
TY - JOUR
T1 - Fabrication of inorganic-organic hybrid films for optical waveguide
AU - Jeong, Sunho
AU - Moon, Jooho
PY - 2005/11/1
Y1 - 2005/11/1
N2 - Inorganic-organic hybrid guiding and buffer layers for optical waveguides were synthesized by the sol-gel process. An acid-catalyzed solution of 3-(trimethoxysilyl)propylmethacrylate and tetraethylorthosilicate was used as a precursor to produce thick films by spin-coating. Incorporation of a UV-sensitive functional group leads to the fabrication of the photo-patternable guiding layer. High-resolution patterned films with 8 μm linewidth were obtained using a conventional photo-lithography. Furthermore, the amount of phenyltrimethoxysilane added as a refractive index modifier varied in order to control the refractive index of the underlying buffer layer. The refractive index variations and structural changes of these inorganic-organic hybrid films as a function of the processing conditions were analyzed using the prism coupling technique and a Fourier transform infrared spectrometer. We have produced optically transparent films at above 500 nm with a propagation loss of 0.84 and 1.49 dB/cm at 1310 and 1550 nm, respectively.
AB - Inorganic-organic hybrid guiding and buffer layers for optical waveguides were synthesized by the sol-gel process. An acid-catalyzed solution of 3-(trimethoxysilyl)propylmethacrylate and tetraethylorthosilicate was used as a precursor to produce thick films by spin-coating. Incorporation of a UV-sensitive functional group leads to the fabrication of the photo-patternable guiding layer. High-resolution patterned films with 8 μm linewidth were obtained using a conventional photo-lithography. Furthermore, the amount of phenyltrimethoxysilane added as a refractive index modifier varied in order to control the refractive index of the underlying buffer layer. The refractive index variations and structural changes of these inorganic-organic hybrid films as a function of the processing conditions were analyzed using the prism coupling technique and a Fourier transform infrared spectrometer. We have produced optically transparent films at above 500 nm with a propagation loss of 0.84 and 1.49 dB/cm at 1310 and 1550 nm, respectively.
UR - http://www.scopus.com/inward/record.url?scp=27344449954&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27344449954&partnerID=8YFLogxK
U2 - 10.1016/j.jnoncrysol.2005.08.029
DO - 10.1016/j.jnoncrysol.2005.08.029
M3 - Article
AN - SCOPUS:27344449954
VL - 351
SP - 3530
EP - 3535
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
SN - 0022-3093
IS - 43-45
ER -