Fabrication of ITO conductive tracks on flexible substrate by UV roll nano imprinting

J. Han, B. S.W. Lee, J. Han, S. Kang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The increasing demands of flexible electronics in the field of flexible display, wearable computer, radio frequency identification and so on make the establishment of patterning technology of conductive tracks on large area flexible substrate with low cost a priority. In conventional flexible electronics fabrication processes, the conductive tracks are formed by lift-off or etching the deposited metallic layer using a barrier formed by photolithography or ink printing. In this study, a method is proposed to form conductive tracks on flexible substrate using UV roll nano imprinting, which is inexpensive and scalable down to sub micrometers. To examine the feasibility of the proposed method, an indium tin oxide (ITO) conductive tracks with widths of 2 ~ 20 um were formed using a UV roll nano imprinting system. A photopolymer pattern was imprinted on an ITO coated polymer film using a UV roll nano imprinting system, which was composed of a roll stamp, a material dispensing unit, a pair of flattening rollers, a contact roller, and a releasing roller. The roll stamp was fabricated by wrapping a thin metal stamp on a roll base, where the thin metal stamp was fabricated by an electroforming process. The ITO conductive tracks were patterned by the wet-etching process using the photopolymer barrier, obtained by UV roll nano imprinting process. Finally, the geometrical properties and electrical conductivity of fabricated ITO patterns were measured and analyzed.

Original languageEnglish
Title of host publicationProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
EditorsHendrik Van Brussel, E. Brinksmeier, H. Spaan, T. Burke
Publishereuspen
Pages483-487
Number of pages5
ISBN (Electronic)9780955308253
Publication statusPublished - 2008
Event10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 - Zurich, Switzerland
Duration: 2008 May 182008 May 22

Publication series

NameProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
Volume2

Other

Other10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
CountrySwitzerland
CityZurich
Period08/5/1808/5/22

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Industrial and Manufacturing Engineering

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