Fabrication of metallic nano-stamper and replication of nano-patterned substrate for patterned media

With an increasing demand for ultra-high-density information storage, patterned media have received much attention as a solution to overcome the limits of conventional continuous magnetic media. One of the current methods to fabricate the patterned media is to use direct patterning and etching. However, those procedures are very costly and are not suitable for mass production. In this study, we investigate the possibility of mass production of patterned media by nano-moulding technology with a metallic nano-stamper. The physically and chemically resistant metallic nano-stamper was fabricated using an electroforming process, and then the nano-patterned substrate was replicated using a nano-moulding process without additional etching. For evaluation of the replication quality, a magnetic layer was deposited on the substrate. We finally confirmed that the magnetic islands were successfully formed as a single magnetic domain on the nano-patterned substrate.