Fabrication of photo-patternable inorganic-organic hybrid film by spin-coating

Sunho Jeong, Woo Hyuk Jang, Joo Ho Moon

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

Organically modified silicate (ORMOSIL) was synthesized by the sol-gel process. The control of the refractive index was achieved by varying the content of phenyltrimethoxysilane as a refractive index modifier. The refractive index variations as a function of UV illumination and baking conditions were analyzed using Fourier transform infrared spectrometer. Incorporation of 3-(trimethoxysilyl)propylmethacrylate as a UV-sensitive functional group allowed to obtain high-resolution patterned films with 7 μm linewidth using a conventional photo-lithography. Relatively thick layers of ORMOSIL film with 11 μm thickness were obtained by a single spin-coating without producing any crack. Heat-treatment at temperatures lower than 150 °C resulted in inorganic-organic hybrid films that exhibited dense microstructure.

Original languageEnglish
Pages (from-to)204-208
Number of pages5
JournalThin Solid Films
Volume466
Issue number1-2
DOIs
Publication statusPublished - 2004 Nov 1

Fingerprint

Spin coating
coating
Silicates
Refractive index
refractivity
Fabrication
fabrication
silicates
Infrared spectrometers
baking
infrared spectrometers
sol-gel processes
Linewidth
Lithography
Functional groups
Sol-gel process
Fourier transforms
heat treatment
lithography
cracks

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Jeong, Sunho ; Jang, Woo Hyuk ; Moon, Joo Ho. / Fabrication of photo-patternable inorganic-organic hybrid film by spin-coating. In: Thin Solid Films. 2004 ; Vol. 466, No. 1-2. pp. 204-208.
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Fabrication of photo-patternable inorganic-organic hybrid film by spin-coating. / Jeong, Sunho; Jang, Woo Hyuk; Moon, Joo Ho.

In: Thin Solid Films, Vol. 466, No. 1-2, 01.11.2004, p. 204-208.

Research output: Contribution to journalArticle

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