Fabrication of surface-textured ZnO:Al/ITO bilayers with enhanced electrical and light-scattering properties

Jung Jin Kim, Joo Hyung Park, Jinsu Yoo, Yong Soo Cho, Jun Sik Cho

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Highly textured ZnO:Al/ITO bilayers with excellent electrical and light-scattering properties were prepared on glass substrates using RF magnetron sputtering followed by a wet-etching process. In the bilayer structure, the sputtered ZnO:Al films were deposited on highly conductive ITO-coated glass substrates, and the ZnO:Al surfaces were subsequently chemically etched with a 1% HCl solution to modify the surface morphology. After wet-etching for the as-deposited ZnO:Al films without ITO films, the diffuse transmittance of the ZnO:Al films without ITO films deposited up to 100 °C was enhanced by the rough surfaces, accompanied by an abrupt increase in the sheet resistance to approximately 300 Ω/square due to the reduction in film thickness. The [001] orientation of the ZnO:Al films deposited on the ITO films with various crystalline orientations decreased significantly compared with the strong [001] preferred orientation of the ZnO:Al films deposited without the ITO films. For the textured ZnO:Al/ITO bilayers, a low sheet resistance below 10 Ω/square was obtained, and the light-scattering properties of these bilayers of 400-1100 nm were superior to those of the Asahi U glass that has been widely used as a transparent conducting electrode in thin-film solar cells. The material properties of the as-deposited and textured ZnO:Al/ITO bilayers with and without ITO films were systematically investigated.

Original languageEnglish
Pages (from-to)75-80
Number of pages6
JournalSolid State Sciences
Volume31
DOIs
Publication statusPublished - 2014 May

Fingerprint

ITO (semiconductors)
Light scattering
light scattering
Fabrication
fabrication
Wet etching
Sheet resistance
Glass
glass
etching
Substrates
Crystal orientation
Magnetron sputtering
Surface morphology
Film thickness
transmittance
Materials properties
magnetron sputtering
film thickness
solar cells

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Kim, Jung Jin ; Park, Joo Hyung ; Yoo, Jinsu ; Cho, Yong Soo ; Cho, Jun Sik. / Fabrication of surface-textured ZnO:Al/ITO bilayers with enhanced electrical and light-scattering properties. In: Solid State Sciences. 2014 ; Vol. 31. pp. 75-80.
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abstract = "Highly textured ZnO:Al/ITO bilayers with excellent electrical and light-scattering properties were prepared on glass substrates using RF magnetron sputtering followed by a wet-etching process. In the bilayer structure, the sputtered ZnO:Al films were deposited on highly conductive ITO-coated glass substrates, and the ZnO:Al surfaces were subsequently chemically etched with a 1{\%} HCl solution to modify the surface morphology. After wet-etching for the as-deposited ZnO:Al films without ITO films, the diffuse transmittance of the ZnO:Al films without ITO films deposited up to 100 °C was enhanced by the rough surfaces, accompanied by an abrupt increase in the sheet resistance to approximately 300 Ω/square due to the reduction in film thickness. The [001] orientation of the ZnO:Al films deposited on the ITO films with various crystalline orientations decreased significantly compared with the strong [001] preferred orientation of the ZnO:Al films deposited without the ITO films. For the textured ZnO:Al/ITO bilayers, a low sheet resistance below 10 Ω/square was obtained, and the light-scattering properties of these bilayers of 400-1100 nm were superior to those of the Asahi U glass that has been widely used as a transparent conducting electrode in thin-film solar cells. The material properties of the as-deposited and textured ZnO:Al/ITO bilayers with and without ITO films were systematically investigated.",
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Fabrication of surface-textured ZnO:Al/ITO bilayers with enhanced electrical and light-scattering properties. / Kim, Jung Jin; Park, Joo Hyung; Yoo, Jinsu; Cho, Yong Soo; Cho, Jun Sik.

In: Solid State Sciences, Vol. 31, 05.2014, p. 75-80.

Research output: Contribution to journalArticle

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