Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing

Dae Hyun Baek, Jungwook Choi, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We developed a novel approach to fabricate suspended metal- and metal oxide nanowires using carbon nanotubes (CNTs) as sacrificial template. As a potential application that harnesses the unique properties of suspended nanowires, sensitive chemical sensors were demonstrated. The suspended CNTs template was synthesized on the side wall of the electrodes by chemical vapor deposition (CVD), followed by the deposition of nanomaterials on top of the CNTs by evaporation. The CNTs template was completely removed during the oxidation process while the remained nanowires had the identical geometry to the CNTs. Because all the fabrication procedure consists of dry and batch processes, it is possible to mass-produce the sensors without contamination or damage of the nanowires. The fabricated WO3 nano wire-based sensor successfully detected 100 ppm of NO2 at a temperature of 300 °C. The sensing performance of the sensor is attributed to the high surface area of the suspended morphology and small diameter of the nanowires.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages335-338
Number of pages4
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

Fingerprint

Carbon Nanotubes
Nanowires
Carbon nanotubes
nanowires
templates
Gases
carbon nanotubes
Fabrication
fabrication
gases
sensors
Sensors
Metals
harnesses
Chemical sensors
Nanostructured materials
Oxides
metal oxides
Chemical vapor deposition
Evaporation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Baek, D. H., Choi, J., & Kim, J. (2017). Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 335-338). [7863409] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863409
Baek, Dae Hyun ; Choi, Jungwook ; Kim, Jongbaeg. / Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 335-338 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
@inproceedings{a7d4fd9dde774764af45fcae0be5c629,
title = "Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing",
abstract = "We developed a novel approach to fabricate suspended metal- and metal oxide nanowires using carbon nanotubes (CNTs) as sacrificial template. As a potential application that harnesses the unique properties of suspended nanowires, sensitive chemical sensors were demonstrated. The suspended CNTs template was synthesized on the side wall of the electrodes by chemical vapor deposition (CVD), followed by the deposition of nanomaterials on top of the CNTs by evaporation. The CNTs template was completely removed during the oxidation process while the remained nanowires had the identical geometry to the CNTs. Because all the fabrication procedure consists of dry and batch processes, it is possible to mass-produce the sensors without contamination or damage of the nanowires. The fabricated WO3 nano wire-based sensor successfully detected 100 ppm of NO2 at a temperature of 300 °C. The sensing performance of the sensor is attributed to the high surface area of the suspended morphology and small diameter of the nanowires.",
author = "Baek, {Dae Hyun} and Jungwook Choi and Jongbaeg Kim",
year = "2017",
month = "2",
day = "23",
doi = "10.1109/MEMSYS.2017.7863409",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "335--338",
booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",
address = "United States",

}

Baek, DH, Choi, J & Kim, J 2017, Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863409, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 335-338, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863409

Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. / Baek, Dae Hyun; Choi, Jungwook; Kim, Jongbaeg.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 335-338 7863409 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing

AU - Baek, Dae Hyun

AU - Choi, Jungwook

AU - Kim, Jongbaeg

PY - 2017/2/23

Y1 - 2017/2/23

N2 - We developed a novel approach to fabricate suspended metal- and metal oxide nanowires using carbon nanotubes (CNTs) as sacrificial template. As a potential application that harnesses the unique properties of suspended nanowires, sensitive chemical sensors were demonstrated. The suspended CNTs template was synthesized on the side wall of the electrodes by chemical vapor deposition (CVD), followed by the deposition of nanomaterials on top of the CNTs by evaporation. The CNTs template was completely removed during the oxidation process while the remained nanowires had the identical geometry to the CNTs. Because all the fabrication procedure consists of dry and batch processes, it is possible to mass-produce the sensors without contamination or damage of the nanowires. The fabricated WO3 nano wire-based sensor successfully detected 100 ppm of NO2 at a temperature of 300 °C. The sensing performance of the sensor is attributed to the high surface area of the suspended morphology and small diameter of the nanowires.

AB - We developed a novel approach to fabricate suspended metal- and metal oxide nanowires using carbon nanotubes (CNTs) as sacrificial template. As a potential application that harnesses the unique properties of suspended nanowires, sensitive chemical sensors were demonstrated. The suspended CNTs template was synthesized on the side wall of the electrodes by chemical vapor deposition (CVD), followed by the deposition of nanomaterials on top of the CNTs by evaporation. The CNTs template was completely removed during the oxidation process while the remained nanowires had the identical geometry to the CNTs. Because all the fabrication procedure consists of dry and batch processes, it is possible to mass-produce the sensors without contamination or damage of the nanowires. The fabricated WO3 nano wire-based sensor successfully detected 100 ppm of NO2 at a temperature of 300 °C. The sensing performance of the sensor is attributed to the high surface area of the suspended morphology and small diameter of the nanowires.

UR - http://www.scopus.com/inward/record.url?scp=85015747099&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85015747099&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2017.7863409

DO - 10.1109/MEMSYS.2017.7863409

M3 - Conference contribution

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 335

EP - 338

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Baek DH, Choi J, Kim J. Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 335-338. 7863409. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2017.7863409