Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing

Dae Hyun Baek; Jungwook Choi; Jongbaeg Kim

doi:10.1109/MEMSYS.2017.7863409

Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing

Dae Hyun Baek, Jungwook Choi, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We developed a novel approach to fabricate suspended metal- and metal oxide nanowires using carbon nanotubes (CNTs) as sacrificial template. As a potential application that harnesses the unique properties of suspended nanowires, sensitive chemical sensors were demonstrated. The suspended CNTs template was synthesized on the side wall of the electrodes by chemical vapor deposition (CVD), followed by the deposition of nanomaterials on top of the CNTs by evaporation. The CNTs template was completely removed during the oxidation process while the remained nanowires had the identical geometry to the CNTs. Because all the fabrication procedure consists of dry and batch processes, it is possible to mass-produce the sensors without contamination or damage of the nanowires. The fabricated WO₃ nano wire-based sensor successfully detected 100 ppm of NO₂ at a temperature of 300 °C. The sensing performance of the sensor is attributed to the high surface area of the suspended morphology and small diameter of the nanowires.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	335-338
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863409
Publication status	Published - 2017 Feb 23
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

Bibliographical note

Funding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science ICT and future Planning (NRF-2015R1A2A1A01005496)

Publisher Copyright:
© 2017 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2017.7863409

Cite this

Baek, D. H., Choi, J., & Kim, J. (2017). Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 335-338). [7863409] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863409

Baek, Dae Hyun ; Choi, Jungwook ; Kim, Jongbaeg. / Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 335-338 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{a7d4fd9dde774764af45fcae0be5c629,

title = "Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing",

abstract = "We developed a novel approach to fabricate suspended metal- and metal oxide nanowires using carbon nanotubes (CNTs) as sacrificial template. As a potential application that harnesses the unique properties of suspended nanowires, sensitive chemical sensors were demonstrated. The suspended CNTs template was synthesized on the side wall of the electrodes by chemical vapor deposition (CVD), followed by the deposition of nanomaterials on top of the CNTs by evaporation. The CNTs template was completely removed during the oxidation process while the remained nanowires had the identical geometry to the CNTs. Because all the fabrication procedure consists of dry and batch processes, it is possible to mass-produce the sensors without contamination or damage of the nanowires. The fabricated WO3 nano wire-based sensor successfully detected 100 ppm of NO2 at a temperature of 300 °C. The sensing performance of the sensor is attributed to the high surface area of the suspended morphology and small diameter of the nanowires.",

author = "Baek, {Dae Hyun} and Jungwook Choi and Jongbaeg Kim",

note = "Funding Information: This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science ICT and future Planning (NRF-2015R1A2A1A01005496) Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

year = "2017",

month = feb,

day = "23",

doi = "10.1109/MEMSYS.2017.7863409",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "335--338",

booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",

address = "United States",

}

Baek, DH, Choi, J & Kim, J 2017, Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863409, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 335-338, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863409

Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. / Baek, Dae Hyun; Choi, Jungwook; Kim, Jongbaeg.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 335-338 7863409 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing

AU - Baek, Dae Hyun

AU - Choi, Jungwook

AU - Kim, Jongbaeg

N1 - Funding Information: This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science ICT and future Planning (NRF-2015R1A2A1A01005496) Publisher Copyright: © 2017 IEEE.

PY - 2017/2/23

Y1 - 2017/2/23

N2 - We developed a novel approach to fabricate suspended metal- and metal oxide nanowires using carbon nanotubes (CNTs) as sacrificial template. As a potential application that harnesses the unique properties of suspended nanowires, sensitive chemical sensors were demonstrated. The suspended CNTs template was synthesized on the side wall of the electrodes by chemical vapor deposition (CVD), followed by the deposition of nanomaterials on top of the CNTs by evaporation. The CNTs template was completely removed during the oxidation process while the remained nanowires had the identical geometry to the CNTs. Because all the fabrication procedure consists of dry and batch processes, it is possible to mass-produce the sensors without contamination or damage of the nanowires. The fabricated WO3 nano wire-based sensor successfully detected 100 ppm of NO2 at a temperature of 300 °C. The sensing performance of the sensor is attributed to the high surface area of the suspended morphology and small diameter of the nanowires.

AB - We developed a novel approach to fabricate suspended metal- and metal oxide nanowires using carbon nanotubes (CNTs) as sacrificial template. As a potential application that harnesses the unique properties of suspended nanowires, sensitive chemical sensors were demonstrated. The suspended CNTs template was synthesized on the side wall of the electrodes by chemical vapor deposition (CVD), followed by the deposition of nanomaterials on top of the CNTs by evaporation. The CNTs template was completely removed during the oxidation process while the remained nanowires had the identical geometry to the CNTs. Because all the fabrication procedure consists of dry and batch processes, it is possible to mass-produce the sensors without contamination or damage of the nanowires. The fabricated WO3 nano wire-based sensor successfully detected 100 ppm of NO2 at a temperature of 300 °C. The sensing performance of the sensor is attributed to the high surface area of the suspended morphology and small diameter of the nanowires.

UR - http://www.scopus.com/inward/record.url?scp=85015747099&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85015747099&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2017.7863409

DO - 10.1109/MEMSYS.2017.7863409

M3 - Conference contribution

AN - SCOPUS:85015747099

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 335

EP - 338

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

Baek DH, Choi J, Kim J. Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 335-338. 7863409. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863409

Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing

Abstract

Publication series

Other

Bibliographical note

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this