Fabrication of suspended nanowires using suspended carbon nanotubes as template for gas sensing

Dae Hyun Baek, Jungwook Choi, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We developed a novel approach to fabricate suspended metal- and metal oxide nanowires using carbon nanotubes (CNTs) as sacrificial template. As a potential application that harnesses the unique properties of suspended nanowires, sensitive chemical sensors were demonstrated. The suspended CNTs template was synthesized on the side wall of the electrodes by chemical vapor deposition (CVD), followed by the deposition of nanomaterials on top of the CNTs by evaporation. The CNTs template was completely removed during the oxidation process while the remained nanowires had the identical geometry to the CNTs. Because all the fabrication procedure consists of dry and batch processes, it is possible to mass-produce the sensors without contamination or damage of the nanowires. The fabricated WO3 nano wire-based sensor successfully detected 100 ppm of NO2 at a temperature of 300 °C. The sensing performance of the sensor is attributed to the high surface area of the suspended morphology and small diameter of the nanowires.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages335-338
Number of pages4
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

Bibliographical note

Funding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science ICT and future Planning (NRF-2015R1A2A1A01005496)

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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