Fabrication of thin film LiCo0.5Ni0.5O2 cathode for Li rechargeable microbattery

Seung Joo Lee, Jong Ki Lee, Dae Woo Kim, Hong Koo Baik, Sung Man Lee

Research output: Contribution to journalArticlepeer-review

64 Citations (Scopus)


LiCo0.5Ni0.5O2 thin film cathodes were fabricated by electron beam evaporation and postannealing in oxygen atmosphere. As-deposited film showed almost amorphous characteristics, but included some crystalline phases. Hexagonal phase of LiCo0.5Ni0.5O2 was formed in the films annealed between 500 and 700°C. The crystallinity of the film was improved as the annealing temperature increased to 700°C. Open-circuit voltage (OCV) curves were measured. Especially, the film annealed at 700°C for 10 min showed a similar OCV curve to that of bulk powder cathode. It can be suggested that LiCo0.5Ni0.5O2 thin film is suitable for the cathode of Li rechargeable microbattery.

Original languageEnglish
Pages (from-to)L268-L270
JournalJournal of the Electrochemical Society
Issue number11
Publication statusPublished - 1996 Nov

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry


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