Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography

J. Han, S. Choi, J. Lim, B. S. Lee, S. Kang

Research output: Contribution to journalArticle

47 Citations (Scopus)

Abstract

A method is proposed to fabricate conductive patterns and tracks on large area flexible substrates using a UV roll imprinting lithography process. A durable metal roll stamp, which is extendable to mass production, was fabricated by using a series of photolithography, electroforming and anti-adhesion coating processes. Indium tin oxide (ITO) conductive patterns and tracks with line widths of 2-20 νm were formed by using the UV roll imprinting process and a subsequent etching process. The geometrical properties and electrical conductivity of fabricated ITO patterns and tracks were measured and analysed.

Original languageEnglish
Article number115503
JournalJournal of Physics D: Applied Physics
Volume42
Issue number11
DOIs
Publication statusPublished - 2009 Sep 17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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