Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography

J. Han, S. Choi, J. Lim, B. S. Lee, Shinill Kang

Research output: Contribution to journalArticle

44 Citations (Scopus)

Abstract

A method is proposed to fabricate conductive patterns and tracks on large area flexible substrates using a UV roll imprinting lithography process. A durable metal roll stamp, which is extendable to mass production, was fabricated by using a series of photolithography, electroforming and anti-adhesion coating processes. Indium tin oxide (ITO) conductive patterns and tracks with line widths of 2-20 νm were formed by using the UV roll imprinting process and a subsequent etching process. The geometrical properties and electrical conductivity of fabricated ITO patterns and tracks were measured and analysed.

Original languageEnglish
Article number115503
JournalJournal of Physics D: Applied Physics
Volume42
Issue number11
DOIs
Publication statusPublished - 2009 Sep 17

Fingerprint

Tin oxides
Indium
Lithography
lithography
Electroforming
Fabrication
indium oxides
tin oxides
fabrication
Photolithography
Substrates
Linewidth
electroforming
Etching
Adhesion
Metals
photolithography
Coatings
coating
adhesion

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

Cite this

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Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography. / Han, J.; Choi, S.; Lim, J.; Lee, B. S.; Kang, Shinill.

In: Journal of Physics D: Applied Physics, Vol. 42, No. 11, 115503, 17.09.2009.

Research output: Contribution to journalArticle

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AU - Kang, Shinill

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