Fabrication of transparent nanocrystalline InGaO 3(ZnO) 2 thin films using a solution process

Kyung Ho Kim, Gun Hee Kim, Hyun Jae Kim

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5 Citations (Scopus)


We used a solution process to fabricate transparent nanocrystalline (nc) InGaO 3(ZnO) 2 thin films on a glass substrate. The formation of the nanocrystals resulted from a self-solid phase reaction (S-SPR). The nanocrystals began to form at a temperature of ̃300 °C, and grew gradually with increasing postannealing temperatures. The optical transmittance of the nc-InGaO 3(ZnO) 2 thin film was ̃92% in the visible range. Fewer oxygen deficiencies occurred in the InGaO 3(ZnO) 2 thin film that was transited from the amorphous (a) to the nc phase. The ratio of oxygen to indium, gallium, and zinc was 1.16, which is close to the stoichiometric value for the nc-InGaO 3(ZnO) 2 thin film.

Original languageEnglish
Pages (from-to)1660-1663
Number of pages4
JournalPhysica Status Solidi (A) Applications and Materials Science
Issue number7
Publication statusPublished - 2010 Jul

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry


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