Fabrication of UV detectors based on ZnO nanowires using silicon microchannel

J. P. Kar, S. N. Das, J. H. Choi, Y. A. Lee, T. Y. Lee, J. M. Myoung

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Abstract

Aligned ZnO nanowires were grown by metal organic chemical vapor deposition on patterned silicon substrate. The shape of nanostructures was greatly influenced by the micropatterned surface. The aspect ratio, packing fraction and the number density of nanowires on top surface are around 10, 0.8 and 107 per mm2, respectively, whereas the values are 20, 0.3 and 5×107 per mm2, respectively, towards the bottom of the cavity. XRD patterns suggest that the nanostructures have good crystallinity. High-resolution transmission electron microscopy confirmed the single-crystalline growth of the ZnO nanowires along the [0 0 0 1] direction. Photosensitivity of the nanowires, grown on both top and bottom surface of the microchannel, was observed. However, the nanowires grown on bottom surface have shown better UV response with base line recovery at dark condition.

Original languageEnglish
Pages (from-to)3305-3309
Number of pages5
JournalJournal of Crystal Growth
Volume311
Issue number12
DOIs
Publication statusPublished - 2009 Jun 1

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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