Abstract
The regularities of superhard carbon nanocomposite (CNCs) growth on a titanium substrate using accelerated C60 ion beam are investigated. Substrate temperature Ts and ion energy E are the main parameters varied during film growth. The formation of CNC coatings with a specific electrical resistance below 1 Ω × m is observed at a substrate temperature Ts above 300 ºC and ion energies from 5 to 8 keV. CNC coatings obtained at Ts in the range of 300–400 ºC consist of graphite crystals with a size of 1–2 nm enclosed in a diamond-like matrix. The sp2/sp3 bond ratio weakly depends on Ts in this temperature range and slightly decreases with ion energy increase (from 0.33 to 0.26 at 5–8 keV). Diamond-like coating grows on a substrate at Ts lower than 300 ºC by 5 and 7 keV ions. At an ion energy of 8 keV and above sputtering of the substrate was found. In all cases a TiC layer is formed at the substrate-coating interface due to the ion-beam mixing. Formation of this interlayer provides good adhesion of the coating to the substrate. The CNC coating on Ti exhibits high corrosion resistance and good protective properties. Thus, composite carbon films could be used as a conductive electrode in various chemical and bio applications.
Original language | English |
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Title of host publication | International Youth Conference on Electronics, Telecommunications and Information Technologies - Proceedings of the YETI 2021 |
Editors | Elena Velichko, Viktoria Kapralova, Platon Karaseov, Sergey Zavjalov, Pablo Angueira, Sergey Andreev |
Publisher | Springer Science and Business Media Deutschland GmbH |
Pages | 385-394 |
Number of pages | 10 |
ISBN (Print) | 9783030811181 |
DOIs | |
Publication status | Published - 2022 |
Event | International Youth Conference on Electronics, Telecommunications, and Information Technologies, YETI 2021 - Saint Petersburg, Russian Federation Duration: 2021 Apr 22 → 2021 Apr 23 |
Publication series
Name | Springer Proceedings in Physics |
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Volume | 268 |
ISSN (Print) | 0930-8989 |
ISSN (Electronic) | 1867-4941 |
Conference
Conference | International Youth Conference on Electronics, Telecommunications, and Information Technologies, YETI 2021 |
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Country/Territory | Russian Federation |
City | Saint Petersburg |
Period | 21/4/22 → 21/4/23 |
Bibliographical note
Funding Information:Work was partly supported by Russian Foundation for Basic Research grant # 19-58-51016 and the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (2019K2A9A1A06097636). Authors thank the Center for Collective Use in Chernogolovka for the usage of JEM-2100 electron microscope. The work at IMT RAS was partly performed in accordance with the Ministry of Science and Higher Education State Task № 075-00355-21-00.
Funding Information:
Acknowledgements Work was partly supported by Russian Foundation for Basic Research grant # 19-58-51016 and the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (2019K2A9A1A06097636). Authors thank the Center for Collective Use in Chernogolovka for the usage of JEM-2100 electron microscope. The work at IMT RAS was partly performed in accordance with the Ministry of Science and Higher Education State Task № 075-00355-21-00.
Publisher Copyright:
© 2022, The Author(s), under exclusive license to Springer Nature Switzerland AG.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)