FEM based simulation of the pulsed laser ablation process in nanosecond fields

Hee Seung Lim; Jeonghoon Yoo

doi:10.1007/s12206-011-0511-z

FEM based simulation of the pulsed laser ablation process in nanosecond fields

Hee Seung Lim, Jeonghoon Yoo

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

For the pulsed laser ablation in nanosecond fields, the key physical phenomenon of the removing process is thermal evaporation. For the process optimization of the nano-second laser ablation, it is essential to set up effective simulation that can reflect material absorption coefficient, energy intensity of laser, laser pulse shape, and so forth. In this research, material ablation in nano-second region is simulated by using a finite element method (FEM) commercial package and its result has been compared with experiment results focused on the difference in the ablation depth and its shape occurred after each laser pulse hitting. Finally, the effect of the parameter variation on the ablation process has been verified.

Original language	English
Pages (from-to)	1811-1816
Number of pages	6
Journal	Journal of Mechanical Science and Technology
Volume	25
Issue number	7
DOIs	https://doi.org/10.1007/s12206-011-0511-z
Publication status	Published - 2011 Jul

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MEST) (No. 2011-0000117).

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Mechanical Engineering

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abstract = "For the pulsed laser ablation in nanosecond fields, the key physical phenomenon of the removing process is thermal evaporation. For the process optimization of the nano-second laser ablation, it is essential to set up effective simulation that can reflect material absorption coefficient, energy intensity of laser, laser pulse shape, and so forth. In this research, material ablation in nano-second region is simulated by using a finite element method (FEM) commercial package and its result has been compared with experiment results focused on the difference in the ablation depth and its shape occurred after each laser pulse hitting. Finally, the effect of the parameter variation on the ablation process has been verified.",

author = "Lim, {Hee Seung} and Jeonghoon Yoo",

note = "Funding Information: This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MEST) (No. 2011-0000117).",

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FEM based simulation of the pulsed laser ablation process in nanosecond fields

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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