Film properties of Al thin films depending on process parameters and film thickness grown by sputter

Il Kwon Oh, Chang Mo Yoon, Jin Wook Jang, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Film properties of Al thin films depending on process parameters and film thickness grown by sputter'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemistry