Flexible polysilicon strain gauge array

Eun Soo Hwang, Yong Jun Kim

Research output: Contribution to journalLetterpeer-review

4 Citations (Scopus)

Abstract

A flexible polysilicon strain gauge array has been realized using a surface micromachining technique with a SiO2 sacrificial layer. The realized sensor array is mechanically flexible, which can be attached on non-planar surfaces. To realize the flexible strain gauge module, a new packaging scheme using a polyimide circuit board and an oxide based surface-micromachining was developed. The proposed packaging scheme completes the strain sensors and the circuit board on a single process, which eliminates additional assembly and alignment problems. The measured gauge factor shows that it is more sensitive than metal strain gauges. Unlike a single-crystal silicon strain gauge, the proposed polysilicon gauge has no limitations in the direction of strain.

Original languageEnglish
Pages (from-to)L810-L813
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume42
Issue number7 B
DOIs
Publication statusPublished - 2003 Jul 15

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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