Widely well-aligned two-dimensional ZnO nanodot arrays (e.g., 40,000 nanodots of 130 nm diameter and 9 nm height over 150 × 150 μm 2 with a period of 750 nm) have been fabricated by metalorganic chemical vapor deposition on SiO2/Si substrates patterned by focused ion beam (FIB). A low-magnification FIB patterning mode allowed the periodical nanopatterning of the substrates over a large area in a short time. Cathodoluminescence and photoluminescence were apparently observed from the ZnO nanodots.
|Journal||Japanese Journal of Applied Physics|
|Issue number||5 B|
|Publication status||Published - 2004 May 15|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)