Focused ion beam patterning for fabrication of periodical two-dimensional zinc oxide nanodot arrays

Widely well-aligned two-dimensional ZnO nanodot arrays (e.g., 40,000 nanodots of 130 nm diameter and 9 nm height over 150 × 150 μm ² with a period of 750 nm) have been fabricated by metalorganic chemical vapor deposition on SiO₂/Si substrates patterned by focused ion beam (FIB). A low-magnification FIB patterning mode allowed the periodical nanopatterning of the substrates over a large area in a short time. Cathodoluminescence and photoluminescence were apparently observed from the ZnO nanodots.