Formation and characterization of self-patterned PZT film for applying to micro-mechanical detecting system

Su Min Ha, Woo Sik Kim, Hyung-Ho Park, Tae Song Kim

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

One-layer self-patterned PZT film with 250 nm thickness was successfully fabricated using a photosensitive stock solution and UV-irradiation process. Ethanol based-photosensitive stock solution having high molar concentration was prepared without any precipitation using diethanolamine (DEA) as stabilizer. A highly perpendicular edge shaped film was obtained through the self micro-patterning procedure. Especially the physical and electrical properties of self-patterned PZT films were compared with those of conventional PZT films. A highly densified microstructure with fine grains was obtained for both films but the self patterned one showed a highly (111) oriented microstructure. The remnant polarization of self-patterned film was slightly higher than that of conventionally processed film, however it showed a conventional and applicable ferroelectric properties.

Original languageEnglish
Pages (from-to)351-357
Number of pages7
JournalFerroelectrics
Volume273
DOIs
Publication statusPublished - 2002 Jan 1

Fingerprint

diethanolamine
microstructure
Microstructure
Ferroelectric materials
Electric properties
Ethanol
ethyl alcohol
Physical properties
physical properties
electrical properties
Irradiation
Polarization
irradiation
polarization

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

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abstract = "One-layer self-patterned PZT film with 250 nm thickness was successfully fabricated using a photosensitive stock solution and UV-irradiation process. Ethanol based-photosensitive stock solution having high molar concentration was prepared without any precipitation using diethanolamine (DEA) as stabilizer. A highly perpendicular edge shaped film was obtained through the self micro-patterning procedure. Especially the physical and electrical properties of self-patterned PZT films were compared with those of conventional PZT films. A highly densified microstructure with fine grains was obtained for both films but the self patterned one showed a highly (111) oriented microstructure. The remnant polarization of self-patterned film was slightly higher than that of conventionally processed film, however it showed a conventional and applicable ferroelectric properties.",
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Formation and characterization of self-patterned PZT film for applying to micro-mechanical detecting system. / Ha, Su Min; Kim, Woo Sik; Park, Hyung-Ho; Kim, Tae Song.

In: Ferroelectrics, Vol. 273, 01.01.2002, p. 351-357.

Research output: Contribution to journalArticle

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