Formation and thermal stability of Ti-capped Co-silicide from Co-Ta alloy films on (100) Si and polycrystalline silicon

Min Joo Kim, Hyo Jick Choi, Dae Hong Ko, Ja Hum Ku, Siyoung Choi, Kazuyuki Fujihara, Cheol Woong Yang

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Physics & Astronomy