Formation of a Ge-rich Si1-xGex (x > 0.9) fin epitaxial layer condensed by dry oxidation

Hyunchul Jang, Byongju Kim, Sangmo Koo, Dae Hong Ko

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

We have selectively grown an epitaxial Si0.35Ge0.65 fin layer in a 65 nm oxide trench pattern array and formed a Ge-rich Si1-xGex (x > 0.9) fin layer with condensed Ge using dry oxidation. During oxidation of the SiGe fin structure, we found that the compressive strain of the condensed SiGe layer was increased by about 1.3% while Ge was efficiently condensed due to a two-dimensional oxidation reaction. In this paper, we discussed in detail the diffusion during the two-dimensional condensation reaction as well as the asymmetric biaxial strain of the SiGe fin before and after oxidation using a reciprocal space mapping measurement. The application of dry oxidation on selectively grown SiGe fin layer can be an effective method for increasing hole mobility of SiGe fin with increased Ge content and self-induced compressive strain.

Original languageEnglish
Article number114001
JournalSemiconductor Science and Technology
Volume32
Issue number11
DOIs
Publication statusPublished - 2017 Sep 29

Bibliographical note

Funding Information:
This work was financially supported by a grant from the R&D Program for Industrial Core Technology funded by the Ministry of Trade, Industry and Energy (MOTIE), Republic of Korea (grant No. 10045216). The authors would like to acknowledge Professor Heungsoo Park for valuable discussions.

Publisher Copyright:
© 2017 IOP Publishing Ltd.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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