We report new carbon-based coating that can be utilysed as a hard chemically inert highly condictive transparent blanket for electrodes and moving parts in a wide range of electronic and MEMS applications. Diamond-like carbon film was grown on (100) n-Si substrate by accelerated C60 ion beam irradiation. Ion energy was kept at 5 and 8 keV, substrate temperature was varied in the range 100–400 ℃. Irradiation with 5 keV beam results in growth of carbon films at all temperatures used. Films are amorphous with high amount of sp3-bonded carbon atoms. Graphite nanocrystals of ~1.5 nm in size were found in the coatings grown at 400 ℃. 8 keV beam sputters the Si target at 100 and 200 ℃, while bombardment at higher temperatures (300 and 400 ℃) results in carbon film growth. Graphite nano-crystal formation is much less pronounced at this energy. In all cases, silicon carbide interlayer is formed at the substrate-coating interface due to the ion-beam mixing effect, which results in a good adhesion of the coating. Electric resistivity of coating obtained with 8 keV ions at Ts = 400 ℃ is 1.5 × 10−4 Ω × m, whereas 5 keV ions at same Ts = 400 ℃ gives 9 × 10−4 Ω × m.
|Title of host publication||International Youth Conference on Electronics, Telecommunications and Information Technologies - Proceedings of the YETI 2020|
|Editors||Elena Velichko, Maksim Vinnichenko, Victoria Kapralova, Yevgeni Koucheryavy|
|Publisher||Springer Science and Business Media Deutschland GmbH|
|Number of pages||9|
|Publication status||Published - 2021|
|Event||International Youth Conference on Electronics, Telecommunications and Information Technologies, YETI 2020 - St. Petersburg, Russian Federation|
Duration: 2020 Jul 10 → 2020 Jul 11
|Name||Springer Proceedings in Physics|
|Conference||International Youth Conference on Electronics, Telecommunications and Information Technologies, YETI 2020|
|Period||20/7/10 → 20/7/11|
Bibliographical noteFunding Information:
Acknowledgements Work was supported by Russian Foundation for Basic Research (RFBR), grant # 19-58-51016 and the National Research Foundation of Korea (NRF) grant funded by the Korea government. (MSIT) (2019K2A9A1A06097636).
© 2021, Springer Nature Switzerland AG.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)