Formation of multilayered magnetic nanotracks with perpendicular anisotropy via deoxidization using ion irradiation on ultraviolet-imprinted intaglio nanostructures

Eikhyun Cho, Sanghoon Kim, Sang Chul Shin, Jungjin Han, Jongmyeong Shim, Ryung Shin, Jongill Hong, Shinill Kang

Research output: Contribution to journalArticle

Abstract

We proposed a method to fabricate perpendicular magnetic nanotracks in the cobalt oxide/palladium multilayer films using UV-nanoimprinting lithography and low-energy hydrogen-ion irradiation. This is a method to magnetize UV-imprinted intaglio nanotracks via low-energy hydrogen ion irradiation, resulting the irradiated region are magnetically separated from the non-irradiated region. Multilayered magnetic nanotracks with a line width of 140 nm, which were fabricated by this parallel process without additional dry etching process, exhibited a saturation magnetization of 290 emu cm-3 and a coercivity of 2 kOe. This study demonstrates a cost-effective mass production of multilayered perpendicular magnetic nanotracks and offers the possibility to achieve high density storage and memory devices.

Original languageEnglish
Article number043104
JournalApplied Physics Letters
Volume106
Issue number4
DOIs
Publication statusPublished - 2015 Jan 26

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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