Formation of shallow junctions using Ge-Si heterostructures for high mobility channel MOSFETs

Jungwoo Oh, Prashant Majhi, Hi Deok Lee, Kyong Taek Lee, Won Ho Choi, Ji Woon Yang, Yong Kang Chang, Rusty Harris, S. C. Song, Pankaj Kalra, Sehoon Lee, Sanjay Banerjee, Hun Lee Byoung, Hsing Huang Tseng, Raj Jammy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

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Engineering & Materials Science