Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere

Ki Wan Park, Tae Il Lee, Hyeon Seok Hwang, Joo Hyon Noh, Hong Koo Baik, Kie Moon Song

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a 200 μm diameter at 9 mA and the optimum value of gas velocity×diameter for hollow cathode effect was obtained in our system. In order to confirm hollow cathode effect, we measured the enhancement of EN strength for 200 μm (0.31 m2 s) and 500 μm (0.78 m2 s) air discharge at 8 mA under the velocity of 156 ms. As a result, an increase of 46.7% in EN strength of the discharge of 200 μm hole was obtained compare to that of 500 μm.

Original languageEnglish
Article number061503
JournalApplied Physics Letters
Volume92
Issue number6
DOIs
Publication statusPublished - 2008 Feb 22

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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