Abstract The friction and deformation behaviors of ∼60-μm-diameter stainless steel micro-balls were assessed under various rolling conditions against Si specimens. In the friction tests, the micro-balls were placed between a stationary flat silicon specimen on the top and a flat or grooved silicon specimen at the bottom that was made to move in a reciprocating motion. Rectangular- and V-shaped grooves were fabricated on the silicon specimen by a photolithographic process, and the effect of groove shape on the frictional behavior of the micro-balls was investigated. Friction coefficient of 0.01 could be successfully achieved when proper rolling was attained. It was found that the number of micro-balls was not a critical factor as long as more than three balls were placed between the two flat Si specimens. Furthermore, rectangular-shaped groove resulted in lower friction than V-shaped groove. This was due to severe deformation of the micro-ball which led to increase in the contact area when the V-shaped groove was used. The results of this work were expected to aid in the development of miniature bearings for applications in small precision systems.
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Surfaces and Interfaces
- Surfaces, Coatings and Films