Abstract
The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20 50 mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25 nm thick carbon and 102 nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed.
| Original language | English |
|---|---|
| Pages (from-to) | 123-131 |
| Number of pages | 9 |
| Journal | Tribology Letters |
| Volume | 48 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2012 Nov 1 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Surfaces and Interfaces
- Surfaces, Coatings and Films
Cite this
}
Friction and wear characteristics of C/Si bi-layer coatings deposited on silicon substrate by DC magnetron sputtering. / Penkov, Oleksiy V.; Bugayev, Yegor A.; Zhuravel, Igor; Kondratenko, Valeriy V.; Amanov, Auezhan; Kim, Dae Eun.
In: Tribology Letters, Vol. 48, No. 2, 01.11.2012, p. 123-131.Research output: Contribution to journal › Article
TY - JOUR
T1 - Friction and wear characteristics of C/Si bi-layer coatings deposited on silicon substrate by DC magnetron sputtering
AU - Penkov, Oleksiy V.
AU - Bugayev, Yegor A.
AU - Zhuravel, Igor
AU - Kondratenko, Valeriy V.
AU - Amanov, Auezhan
AU - Kim, Dae Eun
PY - 2012/11/1
Y1 - 2012/11/1
N2 - The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20 50 mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25 nm thick carbon and 102 nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed.
AB - The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20 50 mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25 nm thick carbon and 102 nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed.
UR - http://www.scopus.com/inward/record.url?scp=84868193561&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84868193561&partnerID=8YFLogxK
U2 - 10.1007/s11249-012-0008-7
DO - 10.1007/s11249-012-0008-7
M3 - Article
VL - 48
SP - 123
EP - 131
JO - Tribology Letters
JF - Tribology Letters
SN - 1023-8883
IS - 2
ER -