Friction and wear characteristics of C/Si bi-layer coatings deposited on silicon substrate by DC magnetron sputtering

Oleksiy V. Penkov, Yegor A. Bugayev, Igor Zhuravel, Valeriy V. Kondratenko, Auezhan Amanov, Dae Eun Kim

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20 50 mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25 nm thick carbon and 102 nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed.

Original languageEnglish
Pages (from-to)123-131
Number of pages9
JournalTribology Letters
Volume48
Issue number2
DOIs
Publication statusPublished - 2012 Nov 1

Fingerprint

Silicon
Magnetron sputtering
magnetron sputtering
friction
direct current
Wear of materials
Friction
coatings
Coatings
silicon
Substrates
carbon
Amorphous carbon
Carbon
Amorphous silicon
Stainless Steel
wear tests
coefficient of friction
amorphous silicon
sliding

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Penkov, Oleksiy V. ; Bugayev, Yegor A. ; Zhuravel, Igor ; Kondratenko, Valeriy V. ; Amanov, Auezhan ; Kim, Dae Eun. / Friction and wear characteristics of C/Si bi-layer coatings deposited on silicon substrate by DC magnetron sputtering. In: Tribology Letters. 2012 ; Vol. 48, No. 2. pp. 123-131.
@article{ed032aab99fc4e99b613e02c2a9b17b9,
title = "Friction and wear characteristics of C/Si bi-layer coatings deposited on silicon substrate by DC magnetron sputtering",
abstract = "The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20 50 mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25 nm thick carbon and 102 nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed.",
author = "Penkov, {Oleksiy V.} and Bugayev, {Yegor A.} and Igor Zhuravel and Kondratenko, {Valeriy V.} and Auezhan Amanov and Kim, {Dae Eun}",
year = "2012",
month = "11",
day = "1",
doi = "10.1007/s11249-012-0008-7",
language = "English",
volume = "48",
pages = "123--131",
journal = "Tribology Letters",
issn = "1023-8883",
publisher = "Springer New York",
number = "2",

}

Friction and wear characteristics of C/Si bi-layer coatings deposited on silicon substrate by DC magnetron sputtering. / Penkov, Oleksiy V.; Bugayev, Yegor A.; Zhuravel, Igor; Kondratenko, Valeriy V.; Amanov, Auezhan; Kim, Dae Eun.

In: Tribology Letters, Vol. 48, No. 2, 01.11.2012, p. 123-131.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Friction and wear characteristics of C/Si bi-layer coatings deposited on silicon substrate by DC magnetron sputtering

AU - Penkov, Oleksiy V.

AU - Bugayev, Yegor A.

AU - Zhuravel, Igor

AU - Kondratenko, Valeriy V.

AU - Amanov, Auezhan

AU - Kim, Dae Eun

PY - 2012/11/1

Y1 - 2012/11/1

N2 - The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20 50 mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25 nm thick carbon and 102 nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed.

AB - The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20 50 mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25 nm thick carbon and 102 nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed.

UR - http://www.scopus.com/inward/record.url?scp=84868193561&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84868193561&partnerID=8YFLogxK

U2 - 10.1007/s11249-012-0008-7

DO - 10.1007/s11249-012-0008-7

M3 - Article

VL - 48

SP - 123

EP - 131

JO - Tribology Letters

JF - Tribology Letters

SN - 1023-8883

IS - 2

ER -