Fully integrated low phase-noise VCOs with on-chip MEMS inductors

Eun Chul Park, Yun Seok Choi, Jun Bo Yoon, Songcheol Hong, Euisik Yoon

Research output: Contribution to journalArticle

59 Citations (Scopus)

Abstract

We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-μm mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.

Original languageEnglish
Pages (from-to)289-296
Number of pages8
JournalIEEE Transactions on Microwave Theory and Techniques
Volume51
Issue number1 II
DOIs
Publication statusPublished - 2003 Jan 1

Fingerprint

voltage controlled oscillators
Variable frequency oscillators
inductors
Phase noise
microelectromechanical systems
MEMS
CMOS
chips
carrier frequencies
Q factors
Networks (circuits)
Metals
metals

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Park, Eun Chul ; Choi, Yun Seok ; Yoon, Jun Bo ; Hong, Songcheol ; Yoon, Euisik. / Fully integrated low phase-noise VCOs with on-chip MEMS inductors. In: IEEE Transactions on Microwave Theory and Techniques. 2003 ; Vol. 51, No. 1 II. pp. 289-296.
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Fully integrated low phase-noise VCOs with on-chip MEMS inductors. / Park, Eun Chul; Choi, Yun Seok; Yoon, Jun Bo; Hong, Songcheol; Yoon, Euisik.

In: IEEE Transactions on Microwave Theory and Techniques, Vol. 51, No. 1 II, 01.01.2003, p. 289-296.

Research output: Contribution to journalArticle

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AU - Yoon, Euisik

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AB - We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-μm mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.

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