Abstract
We have studied structural and electrical properties of one dimensionally grown single crystalline gallium nitride (GaN) nanowires (NWs) for nanoscale devices using a metal-initiated metal-organic chemical vapor deposition (MOCVD). GaN nanowires were formed via the vapor-liquid-solid (VLS) mechanism with gold, iron, or nickel as growth initiators and were found to have triangular cross-sections with widths of 15 ∼ 200 nm and lengths of 5 ∼ 20 μm. TEM confirmed that the nanowires were single crystalline and were well oriented along the [210] or [110] direction on substrate depending on the metal initiators. For electrical transport properties of un-doped GaN nanowires, the back-gated field effect transistors (FET) were also fabricated by standard e-beam lithography. In our electrical measurement, the carrier concentration and mobility were ≈2 ∼ 4 × 1018 cm-3 and 60 ∼ 70 cm2/V s, respectively.
Original language | English |
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Pages (from-to) | 2775-2778 |
Number of pages | 4 |
Journal | Physica Status Solidi (B) Basic Research |
Volume | 241 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2004 Oct |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics