Abstract
In this paper, our aim is to develop a system that can not only maintain stable distance under 100nm but also compensate the tilting between a pick-up head and disk surface for near-field recording (NFR), which is known as a key technology for a next generation optical storage. Applying total internal reflection (TIR) to the air gap measurement, we design an optical sensor to measure the gap distances at three points. Stack and bimorph piezoelectric actuators are utilized for high precision control with nanometer resolution. To understand dynamic characteristics of the system, an analytical method for boundary coupled beam model is performed and verified by comparison with the results of the finite element method (FEM).
Original language | English |
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Pages (from-to) | 68-77 |
Number of pages | 10 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4902 |
DOIs | |
Publication status | Published - 2002 |
Event | Optomechatronic Systems III - Stuttgart, Germany Duration: 2002 Nov 12 → 2002 Nov 14 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering