Gas phase photoproduction of diatomic metal nitrides during metal nitride laser chemical vapor deposition

Jinwoo Cheon, Matthew Guile, Peter Muraoka, Jeffrey I. Zink

Research output: Contribution to journalArticle

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)2238-2239
Number of pages2
JournalInorganic Chemistry
Volume38
Issue number9
Publication statusPublished - 1999 Dec 1

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Nitrides
Chemical vapor deposition
Gases
Metals

All Science Journal Classification (ASJC) codes

  • Inorganic Chemistry

Cite this

Cheon, Jinwoo ; Guile, Matthew ; Muraoka, Peter ; Zink, Jeffrey I. / Gas phase photoproduction of diatomic metal nitrides during metal nitride laser chemical vapor deposition. In: Inorganic Chemistry. 1999 ; Vol. 38, No. 9. pp. 2238-2239.
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Gas phase photoproduction of diatomic metal nitrides during metal nitride laser chemical vapor deposition. / Cheon, Jinwoo; Guile, Matthew; Muraoka, Peter; Zink, Jeffrey I.

In: Inorganic Chemistry, Vol. 38, No. 9, 01.12.1999, p. 2238-2239.

Research output: Contribution to journalArticle

TY - JOUR

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AU - Cheon, Jinwoo

AU - Guile, Matthew

AU - Muraoka, Peter

AU - Zink, Jeffrey I.

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