Gas sensing properties of WO3 doped rutile TiO2 thick film at high operating temperature

Sung Eun Jo, Byeong Geun Kang, Sungmoo Heo, Soonho Song, Yong-Jun Kim

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

A semiconductor gas sensor based on WO3 doped TiO2 having a rutile phase was fabricated on an Al2O3 substrate. The sensing film of the sensor was deposited by using screen printing. In order to enhance the sensitivity of the sensor, the sensing film was fabricated with a porous shape by high temperature heat treatment and the TiO2 layer was doped with WO3 to improve the gas selectivity. The surface topography and inner morphological properties of the sensing film were characterized with scanning electron microscopy (SEM), atomic force microscopy (AFM) and X-ray diffraction (XRD). The gas sensing properties of the fabricated sensor were evaluated by detecting NO2 and other oxidizing gases (CO, O2 and CO2) at high operating temperature (600 °C).

Original languageEnglish
JournalCurrent Applied Physics
Volume9
Issue number4 SUPPL.
DOIs
Publication statusPublished - 2009 Jul 1

Fingerprint

operating temperature
Thick films
rutile
thick films
Gases
sensors
Sensors
gases
Screen printing
Surface topography
Chemical sensors
Temperature
Atomic force microscopy
Heat treatment
printing
Semiconductor materials
X ray diffraction
topography
Scanning electron microscopy
heat treatment

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

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abstract = "A semiconductor gas sensor based on WO3 doped TiO2 having a rutile phase was fabricated on an Al2O3 substrate. The sensing film of the sensor was deposited by using screen printing. In order to enhance the sensitivity of the sensor, the sensing film was fabricated with a porous shape by high temperature heat treatment and the TiO2 layer was doped with WO3 to improve the gas selectivity. The surface topography and inner morphological properties of the sensing film were characterized with scanning electron microscopy (SEM), atomic force microscopy (AFM) and X-ray diffraction (XRD). The gas sensing properties of the fabricated sensor were evaluated by detecting NO2 and other oxidizing gases (CO, O2 and CO2) at high operating temperature (600 °C).",
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Gas sensing properties of WO3 doped rutile TiO2 thick film at high operating temperature. / Jo, Sung Eun; Kang, Byeong Geun; Heo, Sungmoo; Song, Soonho; Kim, Yong-Jun.

In: Current Applied Physics, Vol. 9, No. 4 SUPPL., 01.07.2009.

Research output: Contribution to journalArticle

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AU - Jo, Sung Eun

AU - Kang, Byeong Geun

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AU - Kim, Yong-Jun

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