GE on SI photodiodes for SI cmos monolithic optical receivers

Zhihong Huang, Jungwoo Oh, Joe C. Campbell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We report a Ge growth technique on Si using thin SiGe buffer layers and also discuss photodiodes fabricated on the Ge for Si CMOS monolithic optical receiver applications. The effectiveness of thin SiGe buffer layers in terminating threading dislocations and reducing photodiode dark current for Ge epitaxially grown on Si (001) has been investigated for Ge photodiodes. The dark current of Ge on Si photodiodes can be reduced by over an order of magnitude by incorporating two different composition SiGe buffer layers. A backside-illuminated photodetector has been fabricated with the dark current as low as 3.6 mA/cm 2 at 1 V reverse bias. To improve the speed of the photodiode, a device with thinner SiGe buffer layers was demonstrated and achieved 21.5 GHz bandwidth at 1.31 μm, resulting in a record high efficiency-bandwidth product of 12.9 GHz. copyright The Electrochemical Society.

Original languageEnglish
Title of host publicationECS Transactions - Integrated Optoelectronics 3
Pages1-10
Number of pages10
Edition39
DOIs
Publication statusPublished - 2007 Dec 1
EventIntegrated Optoelectronics 3 - 210th ECS Meeting - Cancun, Mexico
Duration: 2006 Oct 292006 Nov 3

Publication series

NameECS Transactions
Number39
Volume3
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherIntegrated Optoelectronics 3 - 210th ECS Meeting
CountryMexico
CityCancun
Period06/10/2906/11/3

Fingerprint

Optical receivers
Photodiodes
Buffer layers
Dark currents
Bandwidth
Photodetectors
Chemical analysis

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Huang, Z., Oh, J., & Campbell, J. C. (2007). GE on SI photodiodes for SI cmos monolithic optical receivers. In ECS Transactions - Integrated Optoelectronics 3 (39 ed., pp. 1-10). (ECS Transactions; Vol. 3, No. 39). https://doi.org/10.1149/1.2818556
Huang, Zhihong ; Oh, Jungwoo ; Campbell, Joe C. / GE on SI photodiodes for SI cmos monolithic optical receivers. ECS Transactions - Integrated Optoelectronics 3. 39. ed. 2007. pp. 1-10 (ECS Transactions; 39).
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Huang, Z, Oh, J & Campbell, JC 2007, GE on SI photodiodes for SI cmos monolithic optical receivers. in ECS Transactions - Integrated Optoelectronics 3. 39 edn, ECS Transactions, no. 39, vol. 3, pp. 1-10, Integrated Optoelectronics 3 - 210th ECS Meeting, Cancun, Mexico, 06/10/29. https://doi.org/10.1149/1.2818556

GE on SI photodiodes for SI cmos monolithic optical receivers. / Huang, Zhihong; Oh, Jungwoo; Campbell, Joe C.

ECS Transactions - Integrated Optoelectronics 3. 39. ed. 2007. p. 1-10 (ECS Transactions; Vol. 3, No. 39).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Huang Z, Oh J, Campbell JC. GE on SI photodiodes for SI cmos monolithic optical receivers. In ECS Transactions - Integrated Optoelectronics 3. 39 ed. 2007. p. 1-10. (ECS Transactions; 39). https://doi.org/10.1149/1.2818556