Generation of submicrometer structures by photolithography using arrays of spherical microlenses

Ming Hsien Wu, Cheolmin Park, George M. Whitesides

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Generation of submicrometer structures by photolithography using arrays of spherical microlenses'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemistry