Geometric compensation of focused ion beam machining using image processing

Hiwon Lee, Jin Han, Byung Kwon Min, Sang Jo Lee

Research output: Contribution to journalArticle

Abstract

During the process of focused ion beam (FIB) machining, the redeposition of the sputtered material during machining decreases the geometric accuracy of the process. In this paper, a new approach to reducing the geometric error in FIB machining is Introduced. The new algorithm measures the amount of redeposited material after each production cycle and modifies the next process plan. Information on the amount and shape of the geometric error is determined using an image processing method. The geometric error compensation method is applied to a real FIB, and the experimental results demonstrate considerable improvement over uncompensated milling.

Original languageEnglish
Pages (from-to)1270021-1270023
Number of pages3
JournalApplied Physics Express
Volume1
Issue number12
DOIs
Publication statusPublished - 2008 Dec 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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