Ge1−xSx chalcogenide alloys for OTS applications using magnetron sputtering

Minkyu Lee, Sanghyeon Lee, Myoungsub Kim, Seungmin Lee, Chihyeong Won, Taehoon Kim, Chaebeen Kwon, Kukro Yoon, Jinhan Lee, Hyungjun Kim, Taeyoon Lee

Research output: Contribution to journalArticlepeer-review


3D cross (X)–point memory arrays have attracted attention for future memory architecture due to their cost efficiency and high density. Chalcogenide–based materials are suitable candidates for 3D X–point memory because they can be stacked to form both memory and selector with a simple process. Conventional binary chalcogenide ovonic threshold switching (OTS) selectors such as GeXSe1−x or GeTe suffer from thermal instability. Furthermore, ternary OTS selectors are being investigated by doping various materials to overcome thermal instability. Here, we introduce a wide range of Ge1−xSx films to analyze and confirm the selector behavior for future applications. S–rich region (0.5 ≤ x ≤ 0.67) devices behaved as OTS selector with low leakage current (1.3 nA) and high thermal stability (amorphous up to 600 °C). To study the mechanism of devices with different compositions, the modified PF–model was used to calculate trap density, activation energy, subthreshold swing, and distance between traps. Additionally, extracted optical bandgap (1.65 – 3.45 eV) and urbach energy (166 – 103 meV) had good accordance with electrical characteristics of each device. This innovative research has potential to enable 3D X–point memory by combining conformal OTS selector and chalcogenide–based phase change memory.

Original languageEnglish
Article number167409
JournalJournal of Alloys and Compounds
Publication statusPublished - 2023 Jan 5

Bibliographical note

Funding Information:
This paper was result of the research project supported by SK hynix Inc. This research was also supported by the Korea Initiative for fostering the University of Research and Innovation (KIURI) Program of the National Research Foundation (NRF) funded by the Korean government ( MSIT ) (NRF- 2020M3H1A1077207 ), and ICONS (Institute of Convergence Science), Yonsei University. This work was supported by the Korea Medical Device Development Fund grant funded by the Korea government (the Ministry of Science and ICT) (Project Number: KMDF_PR_20200901_0093, 9991006766 ), and Priority Research Centers Program through the National Research Foundation of Korea (NRF- 2019R1A6A1A11055660 ).

Publisher Copyright:
© 2022

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry


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