Giant Pressure Output Efficiency of Capacitive Micromachined Ultrasonic Transducers Using Nano-Silicon-Springs

Hae Youn Kim, Dong Hyun Kang, Shyinyong Shim, Jung Mok Seo, Butrus T. Khuri-Yakub, Bvung Chul Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Although lead-free capacitive micromachined ultrasonic transducers (CMUTs) feature wide bandwidth and high resolution in medical imaging, the weak pressure output efficiency by the small average displacement of the top plate causes narrow imaging depth and high driving voltage, which blur the merits. This paper introduces a nano-silicon-spring-embedded CMUT that improves the transduction efficiency, achieving giant pressure output efficiency at lower voltage due to increasing the average displacement of the plate movement. With the proposed brand new CMUT, the corresponding maximum pressure output at the surface was 1.1 MPa, with 5-cycle pulses of 4.7 MHz and 5 VPP. The great pressure output efficiency was achieved as 220 kPa/V. With this giant transduction efficiency and low voltage operation, future work is to implement a portable and wearable ultrasonic device with the nano-silicon-spring-embedded CMUT.

Original languageEnglish
Title of host publicationIUS 2022 - IEEE International Ultrasonics Symposium
PublisherIEEE Computer Society
ISBN (Electronic)9781665466578
Publication statusPublished - 2022
Event2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy
Duration: 2022 Oct 102022 Oct 13

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727


Conference2022 IEEE International Ultrasonics Symposium, IUS 2022

Bibliographical note

Funding Information:
ACKNOWLEDGMENT This work was supported by the Korea Medical Device Development Fund grant funded by the Korea government (the Ministry of Science and ICT, the Ministry of Trade, Industry and Energy, the Ministry of Health & Welfare, the Ministry of Food and Drug Safety) (Project Number: 1711174481), supported by the Bio & Medical Technology Development Program of the National Research Foundation (NRF) funded by the Korean government (MSIT) (Project Number: 1711156865), and also supported by the KIST Institutional Program (2V09289)

Publisher Copyright:
© 2022 IEEE.

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics


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