Giant Pressure Output Efficiency of Capacitive Micromachined Ultrasonic Transducers Using Nano-Silicon-Springs

Hae Youn Kim; Dong Hyun Kang; Shyinyong Shim; Jung Mok Seo; Butrus T. Khuri-Yakub; Bvung Chul Lee

doi:10.1109/IUS54386.2022.9958066

Giant Pressure Output Efficiency of Capacitive Micromachined Ultrasonic Transducers Using Nano-Silicon-Springs

Hae Youn Kim, Dong Hyun Kang, Shyinyong Shim, Jung Mok Seo, Butrus T. Khuri-Yakub, Bvung Chul Lee

Department of Electrical and Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Although lead-free capacitive micromachined ultrasonic transducers (CMUTs) feature wide bandwidth and high resolution in medical imaging, the weak pressure output efficiency by the small average displacement of the top plate causes narrow imaging depth and high driving voltage, which blur the merits. This paper introduces a nano-silicon-spring-embedded CMUT that improves the transduction efficiency, achieving giant pressure output efficiency at lower voltage due to increasing the average displacement of the plate movement. With the proposed brand new CMUT, the corresponding maximum pressure output at the surface was 1.1 MPa, with 5-cycle pulses of 4.7 MHz and 5 VPP. The great pressure output efficiency was achieved as 220 kPa/V. With this giant transduction efficiency and low voltage operation, future work is to implement a portable and wearable ultrasonic device with the nano-silicon-spring-embedded CMUT.

Original language	English
Title of host publication	IUS 2022 - IEEE International Ultrasonics Symposium
Publisher	IEEE Computer Society
ISBN (Electronic)	9781665466578
DOIs	https://doi.org/10.1109/IUS54386.2022.9958066
Publication status	Published - 2022
Event	2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy Duration: 2022 Oct 10 → 2022 Oct 13

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2022-October
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2022 IEEE International Ultrasonics Symposium, IUS 2022
Country/Territory	Italy
City	Venice
Period	22/10/10 → 22/10/13

Bibliographical note

Funding Information:
ACKNOWLEDGMENT This work was supported by the Korea Medical Device Development Fund grant funded by the Korea government (the Ministry of Science and ICT, the Ministry of Trade, Industry and Energy, the Ministry of Health & Welfare, the Ministry of Food and Drug Safety) (Project Number: 1711174481), supported by the Bio & Medical Technology Development Program of the National Research Foundation (NRF) funded by the Korean government (MSIT) (Project Number: 1711156865), and also supported by the KIST Institutional Program (2V09289)

Publisher Copyright:
© 2022 IEEE.

All Science Journal Classification (ASJC) codes

Acoustics and Ultrasonics

Access to Document

10.1109/IUS54386.2022.9958066

Cite this

Kim, H. Y., Kang, D. H., Shim, S., Seo, J. M., Khuri-Yakub, B. T., & Lee, B. C. (2022). Giant Pressure Output Efficiency of Capacitive Micromachined Ultrasonic Transducers Using Nano-Silicon-Springs. In IUS 2022 - IEEE International Ultrasonics Symposium (IEEE International Ultrasonics Symposium, IUS; Vol. 2022-October). IEEE Computer Society. https://doi.org/10.1109/IUS54386.2022.9958066

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title = "Giant Pressure Output Efficiency of Capacitive Micromachined Ultrasonic Transducers Using Nano-Silicon-Springs",

abstract = "Although lead-free capacitive micromachined ultrasonic transducers (CMUTs) feature wide bandwidth and high resolution in medical imaging, the weak pressure output efficiency by the small average displacement of the top plate causes narrow imaging depth and high driving voltage, which blur the merits. This paper introduces a nano-silicon-spring-embedded CMUT that improves the transduction efficiency, achieving giant pressure output efficiency at lower voltage due to increasing the average displacement of the plate movement. With the proposed brand new CMUT, the corresponding maximum pressure output at the surface was 1.1 MPa, with 5-cycle pulses of 4.7 MHz and 5 VPP. The great pressure output efficiency was achieved as 220 kPa/V. With this giant transduction efficiency and low voltage operation, future work is to implement a portable and wearable ultrasonic device with the nano-silicon-spring-embedded CMUT.",

author = "Kim, {Hae Youn} and Kang, {Dong Hyun} and Shyinyong Shim and Seo, {Jung Mok} and Khuri-Yakub, {Butrus T.} and Lee, {Bvung Chul}",

note = "Funding Information: ACKNOWLEDGMENT This work was supported by the Korea Medical Device Development Fund grant funded by the Korea government (the Ministry of Science and ICT, the Ministry of Trade, Industry and Energy, the Ministry of Health & Welfare, the Ministry of Food and Drug Safety) (Project Number: 1711174481), supported by the Bio & Medical Technology Development Program of the National Research Foundation (NRF) funded by the Korean government (MSIT) (Project Number: 1711156865), and also supported by the KIST Institutional Program (2V09289) Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Ultrasonics Symposium, IUS 2022 ; Conference date: 10-10-2022 Through 13-10-2022",

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doi = "10.1109/IUS54386.2022.9958066",

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Kim, HY, Kang, DH, Shim, S, Seo, JM, Khuri-Yakub, BT & Lee, BC 2022, Giant Pressure Output Efficiency of Capacitive Micromachined Ultrasonic Transducers Using Nano-Silicon-Springs. in IUS 2022 - IEEE International Ultrasonics Symposium. IEEE International Ultrasonics Symposium, IUS, vol. 2022-October, IEEE Computer Society, 2022 IEEE International Ultrasonics Symposium, IUS 2022, Venice, Italy, 22/10/10. https://doi.org/10.1109/IUS54386.2022.9958066

Giant Pressure Output Efficiency of Capacitive Micromachined Ultrasonic Transducers Using Nano-Silicon-Springs. / Kim, Hae Youn; Kang, Dong Hyun; Shim, Shyinyong et al.

IUS 2022 - IEEE International Ultrasonics Symposium. IEEE Computer Society, 2022. (IEEE International Ultrasonics Symposium, IUS; Vol. 2022-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Khuri-Yakub, Butrus T.

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N1 - Funding Information: ACKNOWLEDGMENT This work was supported by the Korea Medical Device Development Fund grant funded by the Korea government (the Ministry of Science and ICT, the Ministry of Trade, Industry and Energy, the Ministry of Health & Welfare, the Ministry of Food and Drug Safety) (Project Number: 1711174481), supported by the Bio & Medical Technology Development Program of the National Research Foundation (NRF) funded by the Korean government (MSIT) (Project Number: 1711156865), and also supported by the KIST Institutional Program (2V09289) Publisher Copyright: © 2022 IEEE.

PY - 2022

Y1 - 2022

N2 - Although lead-free capacitive micromachined ultrasonic transducers (CMUTs) feature wide bandwidth and high resolution in medical imaging, the weak pressure output efficiency by the small average displacement of the top plate causes narrow imaging depth and high driving voltage, which blur the merits. This paper introduces a nano-silicon-spring-embedded CMUT that improves the transduction efficiency, achieving giant pressure output efficiency at lower voltage due to increasing the average displacement of the plate movement. With the proposed brand new CMUT, the corresponding maximum pressure output at the surface was 1.1 MPa, with 5-cycle pulses of 4.7 MHz and 5 VPP. The great pressure output efficiency was achieved as 220 kPa/V. With this giant transduction efficiency and low voltage operation, future work is to implement a portable and wearable ultrasonic device with the nano-silicon-spring-embedded CMUT.

AB - Although lead-free capacitive micromachined ultrasonic transducers (CMUTs) feature wide bandwidth and high resolution in medical imaging, the weak pressure output efficiency by the small average displacement of the top plate causes narrow imaging depth and high driving voltage, which blur the merits. This paper introduces a nano-silicon-spring-embedded CMUT that improves the transduction efficiency, achieving giant pressure output efficiency at lower voltage due to increasing the average displacement of the plate movement. With the proposed brand new CMUT, the corresponding maximum pressure output at the surface was 1.1 MPa, with 5-cycle pulses of 4.7 MHz and 5 VPP. The great pressure output efficiency was achieved as 220 kPa/V. With this giant transduction efficiency and low voltage operation, future work is to implement a portable and wearable ultrasonic device with the nano-silicon-spring-embedded CMUT.

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Giant Pressure Output Efficiency of Capacitive Micromachined Ultrasonic Transducers Using Nano-Silicon-Springs

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Bibliographical note

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