Glass molding of nano grating structure using vitreous carbon nanostamp for photonic crystal optical filter

Jonghyun Ju, Tae Hyoung Kim, Shinill Kang, Seok Min Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A method to fabricate vitreous carbon (VC) stamp was proposed for glass molding of micro/nano-scale components. A VC nanostamp having a nanograting cavity with a pitch of ~380 nm and a height of ~150 nm was fabricated by carbonization of nano replicated furan precursor having a nanograting structure with a pitch of 500 nm and height of 230 nm. A glass nanograting structure with a pitch of ~380 nm was fabricated by glass molding with the VC stamp. To examine the feasibility of the proposed method, the thermal stability of photonic crystal optical filters composed of glass moulded nanograting and physical vapor deposited TiO2 layer was evaluated.

Original languageEnglish
Title of host publicationProceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013
Publishereuspen
Pages356-359
Number of pages4
Volume2
ISBN (Electronic)9780956679024
Publication statusPublished - 2013 Jan 1
Event13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013 - Berlin, Germany
Duration: 2013 May 272013 May 31

Other

Other13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013
CountryGermany
CityBerlin
Period13/5/2713/5/31

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Industrial and Manufacturing Engineering
  • Instrumentation

Cite this

Ju, J., Kim, T. H., Kang, S., & Kim, S. M. (2013). Glass molding of nano grating structure using vitreous carbon nanostamp for photonic crystal optical filter. In Proceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013 (Vol. 2, pp. 356-359). euspen.