Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime

Eunhwan Jo, Yong Bok Lee, Jaeyong Lee, Su Bon Kim, Wondo Kim, Min Ho Seo, Jun Bo Yoon, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work demonstrates a highly reliable microelectromechanical (MEM) switch with high switching performance by integrating gold (Au)-decorated carbon nanotube (CNT) network in the contact area. By decorating the CNTs with Au nanoparticles (Au-NPs), we obtained several times extension in the lifetime of the MEM switch with low contact resistance. We verified that the extended lifetime and the low contact resistance originate from the deformable CNTs under mechanical load and the Au NPs with high conductivity at the contact-interface. Our switch also revealed low adhesion force at the contact-interface, which results in highly repeatable and stable actuation voltages at both turn-on and off, whereas typical MEM switches with high adhesion force show irreversible stiction or unstable turn-off voltage. The proposed switch exhibited 1.9 times longer lifetime under hot-switching conditions, compared to previously studied MEM switches based on Au-Au contact.

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages958-961
Number of pages4
ISBN (Electronic)9781728116105
DOIs
Publication statusPublished - 2019 Jan
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 2019 Jan 272019 Jan 31

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period19/1/2719/1/31

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Jo, E., Lee, Y. B., Lee, J., Kim, S. B., Kim, W., Seo, M. H., Yoon, J. B., & Kim, J. (2019). Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 958-961). [8870859] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870859