Graphene metallization of high-stress silicon nitride resonators for electrical integration

Sunwoo Lee, Vivekananda P. Adiga, Robert A. Barton, Arend M. Van Der Zande, Gwan Hyoung Lee, B. Rob Ilic, Alexander Gondarenko, Jeevak M. Parpia, Harold G. Craighead, James Hone

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Chemical Compounds

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