Graphene Via Contact Architecture for Vertical Integration of vdW Heterostructure Devices

Yongjun Shin, Junyoung Kwon, Yeonsu Jeong, Kenji Watanabe, Takashi Taniguchi, Seongil Im, Gwan Hyoung Lee

Research output: Contribution to journalArticlepeer-review


Two-dimensional (2D) devices and their van der Waals (vdW) heterostructures attract considerable attention owing to their potential for next-generation logic and memory applications. In addition, 2D devices are projected to have high integration capabilities, while maintaining nanoscale thickness. However, the fabrication of 2D devices and their circuits is challenging because of the high precision required to etch and pattern ultrathin 2D materials for integration. Here, the fabrication of a graphene via contact architecture to electrically connect graphene electrodes (or leads) embedded in vdW heterostructures is demonstrated. Graphene via contacts comprising of edge and fluorinated graphene (FG) electrodes are fabricated by successive fluorination and plasma etching processes. A one-step fabrication process that utilizes the graphene contacts is developed for a vertically integrated complementary inverter based on n- and p-type 2D field-effect transistors (FETs). This study provides a promising method to fabricate vertically integrated 2D devices, which are essential in 2D material-based devices and circuits.

Original languageEnglish
Article number2200882
Issue number28
Publication statusPublished - 2022 Jul 14

Bibliographical note

Funding Information:
This work was supported by Samsung Electronics Co., Ltd (IO201210-07987-01) and Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT & Future Planning (2017R1A5A1014862, SRC program: vdWMRC center and 2021R1A2C3014316). K.W. and T.T. acknowledge support from the Elemental Strategy Initiative conducted by the MEXT, Japan (Grant Number JPMXP0112101001), JSPS KAKENHI (Grant Numbers 19H05790, 20H00354, and 21H05233), and A3 Foresight by JSPS.

Publisher Copyright:
© 2022 Wiley-VCH GmbH.

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Chemistry(all)
  • Biomaterials
  • Materials Science(all)


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