Growth and characterization of diamond-like carbon films by pulsed laser deposition and hydrogen beam treatment

A. Stavrides, J. Ren, M. Ho, J. Cheon, J. Zink, H. P. Gillis, R. S. Williams

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12 Citations (Scopus)

Abstract

Amorphous diamond-like carbon films have been grown by pulsed laser deposition using a graphite target both with and without an atomic hydrogen beam incident on the growing film. Films grown with the hydrogen beam showed resistivity nearly two orders of magnitude higher than the films grown without hydrogen. Raman scattering confirmed a higher degree of sp3 bonding in films exposed to hydrogen atoms during growth. Films grown without hydrogen but exposed to the hydrogen beam after growth showed a significant increase in resistivity after exposure.

Original languageEnglish
Pages (from-to)27-31
Number of pages5
JournalThin Solid Films
Volume335
Issue number1-2
DOIs
Publication statusPublished - 1998 Nov 19

Bibliographical note

Funding Information:
The authors wish to thank P.A. Steiner IV for technical assistance in setting up the hydrogen atom source. This work was supported by the National Science Foundation (grant no. DMR 92-02879) and by the Office of Naval Research (grant no. N0001492J1718).

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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