Growth and physical properties of epitaxial CeN layers on MgO(001)

T. Y. Lee; D. Gall; C. S. Shin; N. Hellgren; I. Petrov; J. E. Greene

doi:10.1063/1.1579113

Growth and physical properties of epitaxial CeN layers on MgO(001)

T. Y. Lee, D. Gall, C. S. Shin, N. Hellgren, I. Petrov, J. E. Greene

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

Growth and physical properties of epitaxial CeN layers on MgO were investigated. The films were grown by ultrahigh vacuum reactive magnetron sputter deposition. X-ray diffraction and transmission electron microscopy were used for the analysis. The hardness and elastic modulus of CeN were determined from nanoindentation measurements.

Original language	English
Pages (from-to)	921-927
Number of pages	7
Journal	Journal of Applied Physics
Volume	94
Issue number	2
DOIs	https://doi.org/10.1063/1.1579113
Publication status	Published - 2003 Jul 15

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

Access to Document

10.1063/1.1579113

Cite this

@article{315251357dc947ce8a4fb598246a2d56,

title = "Growth and physical properties of epitaxial CeN layers on MgO(001)",

abstract = "Growth and physical properties of epitaxial CeN layers on MgO were investigated. The films were grown by ultrahigh vacuum reactive magnetron sputter deposition. X-ray diffraction and transmission electron microscopy were used for the analysis. The hardness and elastic modulus of CeN were determined from nanoindentation measurements.",

author = "Lee, {T. Y.} and D. Gall and Shin, {C. S.} and N. Hellgren and I. Petrov and Greene, {J. E.}",

year = "2003",

month = jul,

day = "15",

doi = "10.1063/1.1579113",

language = "English",

volume = "94",

pages = "921--927",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "2",

}

TY - JOUR

T1 - Growth and physical properties of epitaxial CeN layers on MgO(001)

AU - Lee, T. Y.

AU - Gall, D.

AU - Shin, C. S.

AU - Hellgren, N.

AU - Petrov, I.

AU - Greene, J. E.

PY - 2003/7/15

Y1 - 2003/7/15

N2 - Growth and physical properties of epitaxial CeN layers on MgO were investigated. The films were grown by ultrahigh vacuum reactive magnetron sputter deposition. X-ray diffraction and transmission electron microscopy were used for the analysis. The hardness and elastic modulus of CeN were determined from nanoindentation measurements.

AB - Growth and physical properties of epitaxial CeN layers on MgO were investigated. The films were grown by ultrahigh vacuum reactive magnetron sputter deposition. X-ray diffraction and transmission electron microscopy were used for the analysis. The hardness and elastic modulus of CeN were determined from nanoindentation measurements.

UR - http://www.scopus.com/inward/record.url?scp=0042768579&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042768579&partnerID=8YFLogxK

U2 - 10.1063/1.1579113

DO - 10.1063/1.1579113

M3 - Article

AN - SCOPUS:0042768579

SN - 0021-8979

VL - 94

SP - 921

EP - 927

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2

ER -

Growth and physical properties of epitaxial CeN layers on MgO(001)

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this