Growth and physical properties of epitaxial CeN layers on MgO were investigated. The films were grown by ultrahigh vacuum reactive magnetron sputter deposition. X-ray diffraction and transmission electron microscopy were used for the analysis. The hardness and elastic modulus of CeN were determined from nanoindentation measurements.
|Number of pages||7|
|Journal||Journal of Applied Physics|
|Publication status||Published - 2003 Jul 15|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)