Growth and physical properties of epitaxial CeN layers on MgO(001)

T. Y. Lee, D. Gall, C. S. Shin, N. Hellgren, I. Petrov, J. E. Greene

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27 Citations (Scopus)

Abstract

Growth and physical properties of epitaxial CeN layers on MgO were investigated. The films were grown by ultrahigh vacuum reactive magnetron sputter deposition. X-ray diffraction and transmission electron microscopy were used for the analysis. The hardness and elastic modulus of CeN were determined from nanoindentation measurements.

Original languageEnglish
Pages (from-to)921-927
Number of pages7
JournalJournal of Applied Physics
Volume94
Issue number2
DOIs
Publication statusPublished - 2003 Jul 15

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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    Lee, T. Y., Gall, D., Shin, C. S., Hellgren, N., Petrov, I., & Greene, J. E. (2003). Growth and physical properties of epitaxial CeN layers on MgO(001). Journal of Applied Physics, 94(2), 921-927. https://doi.org/10.1063/1.1579113