Growth characteristics and film properties of cerium dioxide prepared by plasma-enhanced atomic layer deposition

Woo Hee Kim, Min Kyu Kim, W. J. Maeng, Julien Gatineau, Venkat Pallem, Christian Dussarrat, Atif Noori, David Thompson, Schubert Chu, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science