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Growth characteristics and film properties of cerium dioxide prepared by plasma-enhanced atomic layer deposition
Woo Hee Kim, Min Kyu Kim, W. J. Maeng, Julien Gatineau, Venkat Pallem, Christian Dussarrat, Atif Noori, David Thompson, Schubert Chu, Hyungjun Kim
Research output: Contribution to journal › Article › peer-review
26
Citations
(Scopus)