Growth kinetics of silicon nanowires by platinum assisted vapour-liquid-solid mechanism

H. Jeong, T. E. Park, H. K. Seong, M. Kim, U. Kim, Heon-Jin Choi

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

The growth kinetics of Si nanowires produced by a vapour-liquid-solid (VLS) mechanism in conjunction with Pt and Au catalysts, respectively, was investigated and compared. Pt was employed as a VLS catalyst for single-crystal Si nanowires in a SiCl4-based chemical vapour deposition process. The growth rates were higher with Pt than with Au under all processing conditions. The activation energy was measured as 80 and 130 kJ/mol with the Pt and Au catalysts, respectively. The present results suggest that the rate-determining step is the incorporation of Si atoms in the lattice at the liquid/solid interfaces and, furthermore, the metal catalysts affect this step, resulting in different activation energy.

Original languageEnglish
Pages (from-to)331-334
Number of pages4
JournalChemical Physics Letters
Volume467
Issue number4-6
DOIs
Publication statusPublished - 2009 Jan 5

Fingerprint

Growth kinetics
Silicon
Platinum
Nanowires
platinum
nanowires
Vapors
vapors
catalysts
Catalysts
kinetics
Liquids
silicon
liquids
Activation energy
activation energy
liquid-solid interfaces
Chemical vapor deposition
Metals
Single crystals

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)
  • Physical and Theoretical Chemistry

Cite this

Jeong, H. ; Park, T. E. ; Seong, H. K. ; Kim, M. ; Kim, U. ; Choi, Heon-Jin. / Growth kinetics of silicon nanowires by platinum assisted vapour-liquid-solid mechanism. In: Chemical Physics Letters. 2009 ; Vol. 467, No. 4-6. pp. 331-334.
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Growth kinetics of silicon nanowires by platinum assisted vapour-liquid-solid mechanism. / Jeong, H.; Park, T. E.; Seong, H. K.; Kim, M.; Kim, U.; Choi, Heon-Jin.

In: Chemical Physics Letters, Vol. 467, No. 4-6, 05.01.2009, p. 331-334.

Research output: Contribution to journalArticle

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AU - Park, T. E.

AU - Seong, H. K.

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