Growth mode of epitaxial Si0.5Ge0.5 layer grown on Si(100) by ion-beam-assisted deposition

S. W. Park, J. Y. Shim, Hong Koo Baik

Research output: Contribution to journalArticle

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Abstract

The nucleation and growth of the Si0.5Ge0.5 alloy layer on Si (100) substrate during ion-beam-assisted deposition (IBAD) have been investigated by atomic force microscopy, reflection high-energy electron diffraction, transmission electron microscopy, and double-crystal rocking diffraction. We confirmed that Si0.5Ge0.5 nucleates on Si (100) via the Stranski-Krastanov (SK) mechanism by IBAD, and Ar-ion bombardment suppressed SK growth mode as well as improved crystalline perfection. The epitaxial temperature was observed at 200 °C, and it was much lower than the growth temperature (550-600 °C) in molecular-beam epitaxy (MBE). The χmin value (the ratio of channeling to random backscattering yields) was 10.5% lower than the obtained MBE value. The effect of ion bombardment on nucleation was explained as the result of ion-bombardment-induced dissociation of three-dimensional islands and enhanced surface diffusion, and appeared only at low deposition temperatures where the dissociation of three-dimensional islands is more favorable than the formation of those islands.

Original languageEnglish
Pages (from-to)5993-5999
Number of pages7
JournalJournal of Applied Physics
Volume78
Issue number10
DOIs
Publication statusPublished - 1995 Dec 1

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bombardment
ion beams
molecular beam epitaxy
nucleation
dissociation
ions
surface diffusion
high energy electrons
temperature
backscattering
electron diffraction
atomic force microscopy
transmission electron microscopy
diffraction
crystals

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

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title = "Growth mode of epitaxial Si0.5Ge0.5 layer grown on Si(100) by ion-beam-assisted deposition",
abstract = "The nucleation and growth of the Si0.5Ge0.5 alloy layer on Si (100) substrate during ion-beam-assisted deposition (IBAD) have been investigated by atomic force microscopy, reflection high-energy electron diffraction, transmission electron microscopy, and double-crystal rocking diffraction. We confirmed that Si0.5Ge0.5 nucleates on Si (100) via the Stranski-Krastanov (SK) mechanism by IBAD, and Ar-ion bombardment suppressed SK growth mode as well as improved crystalline perfection. The epitaxial temperature was observed at 200 °C, and it was much lower than the growth temperature (550-600 °C) in molecular-beam epitaxy (MBE). The χmin value (the ratio of channeling to random backscattering yields) was 10.5{\%} lower than the obtained MBE value. The effect of ion bombardment on nucleation was explained as the result of ion-bombardment-induced dissociation of three-dimensional islands and enhanced surface diffusion, and appeared only at low deposition temperatures where the dissociation of three-dimensional islands is more favorable than the formation of those islands.",
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Growth mode of epitaxial Si0.5Ge0.5 layer grown on Si(100) by ion-beam-assisted deposition. / Park, S. W.; Shim, J. Y.; Baik, Hong Koo.

In: Journal of Applied Physics, Vol. 78, No. 10, 01.12.1995, p. 5993-5999.

Research output: Contribution to journalArticle

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N2 - The nucleation and growth of the Si0.5Ge0.5 alloy layer on Si (100) substrate during ion-beam-assisted deposition (IBAD) have been investigated by atomic force microscopy, reflection high-energy electron diffraction, transmission electron microscopy, and double-crystal rocking diffraction. We confirmed that Si0.5Ge0.5 nucleates on Si (100) via the Stranski-Krastanov (SK) mechanism by IBAD, and Ar-ion bombardment suppressed SK growth mode as well as improved crystalline perfection. The epitaxial temperature was observed at 200 °C, and it was much lower than the growth temperature (550-600 °C) in molecular-beam epitaxy (MBE). The χmin value (the ratio of channeling to random backscattering yields) was 10.5% lower than the obtained MBE value. The effect of ion bombardment on nucleation was explained as the result of ion-bombardment-induced dissociation of three-dimensional islands and enhanced surface diffusion, and appeared only at low deposition temperatures where the dissociation of three-dimensional islands is more favorable than the formation of those islands.

AB - The nucleation and growth of the Si0.5Ge0.5 alloy layer on Si (100) substrate during ion-beam-assisted deposition (IBAD) have been investigated by atomic force microscopy, reflection high-energy electron diffraction, transmission electron microscopy, and double-crystal rocking diffraction. We confirmed that Si0.5Ge0.5 nucleates on Si (100) via the Stranski-Krastanov (SK) mechanism by IBAD, and Ar-ion bombardment suppressed SK growth mode as well as improved crystalline perfection. The epitaxial temperature was observed at 200 °C, and it was much lower than the growth temperature (550-600 °C) in molecular-beam epitaxy (MBE). The χmin value (the ratio of channeling to random backscattering yields) was 10.5% lower than the obtained MBE value. The effect of ion bombardment on nucleation was explained as the result of ion-bombardment-induced dissociation of three-dimensional islands and enhanced surface diffusion, and appeared only at low deposition temperatures where the dissociation of three-dimensional islands is more favorable than the formation of those islands.

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