To fabricate a ceramic-based substrate for 3-dimensional integration modules with a thick film coating process at room temperature, aerosol deposition method was employed. Al 2O 3 was chosen as a main coating material for the requirements of low permittivity and dielectric loss. Especially to give a functionality of plasticity, composite film with polytetrafluoroethylene (PTFE) was also studied. The effects of PTFE, which was incorporated in the film, were investigated by the microstructural characterization. It was confirmed that Al 2O 3-PTFE film with the grain size of 100-200 nm were grown at room temperature using Al 2O 3-0.5 wt% PTFE mixture powders. Dielectric constant and dielectric loss of Al 2O 3-PTFE film were 4.5 and 0.005 at 1 MHz, respectively.
Bibliographical noteFunding Information:
This research was supported by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy , Republic of Korea.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Materials Chemistry