Growth of Al 2O 3-PTFE composite film at room temperature by aerosol deposition method

Sung Hwan Cho, Young Joon Yoon, Hyo Tae Kim, Jihoon Kim, Hyung Jun Kim, Song Min Nam, Hong Koo Baik, Jong Hee Kim

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Abstract

To fabricate a ceramic-based substrate for 3-dimensional integration modules with a thick film coating process at room temperature, aerosol deposition method was employed. Al 2O 3 was chosen as a main coating material for the requirements of low permittivity and dielectric loss. Especially to give a functionality of plasticity, composite film with polytetrafluoroethylene (PTFE) was also studied. The effects of PTFE, which was incorporated in the film, were investigated by the microstructural characterization. It was confirmed that Al 2O 3-PTFE film with the grain size of 100-200 nm were grown at room temperature using Al 2O 3-0.5 wt% PTFE mixture powders. Dielectric constant and dielectric loss of Al 2O 3-PTFE film were 4.5 and 0.005 at 1 MHz, respectively.

Original languageEnglish
Pages (from-to)S131-S134
JournalCeramics International
Volume38
Issue numberSUPPL. 1
DOIs
Publication statusPublished - 2012 Jan

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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    Cho, S. H., Yoon, Y. J., Kim, H. T., Kim, J., Kim, H. J., Nam, S. M., Baik, H. K., & Kim, J. H. (2012). Growth of Al 2O 3-PTFE composite film at room temperature by aerosol deposition method. Ceramics International, 38(SUPPL. 1), S131-S134. https://doi.org/10.1016/j.ceramint.2011.04.066