Growth of epitaxial strontium barium niobate thin films by solid source metal-organic chemical vapor deposition

Myeongkyu Lee, Robert S. Feigelson

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Strontium barium niobate (SrxBa1-xNb2O6) thin films have been epitaxially grown on (0 0 1)MgO, (1 1 0)MgO and (0 0 1)Sr0.75Ba0.25Nb2O6 substrates by solid source metal-organic chemical vapor deposition. Films became amorphous when the substrate temperature was below 535 °C. The crystallinity of the film improved approximately with decreasing growth rate. Film compositions could be controlled by varying source compositions. Single crystalline films were deposited on (0 0 1)Sr0.75Ba0.25Nb2O6 single crystal substrates while films grown on (0 0 1)MgO and (1 1 0)MgO substrates revealed four in-plane orientations. Waveguiding behavior was demonstrated for both TE and TM modes with the films grown on (0 0 1)MgO substrates. The measured refractive indices were in agreement with those of bulk crystal.

Original languageEnglish
Pages (from-to)220-228
Number of pages9
JournalJournal of Crystal Growth
Volume180
Issue number2
DOIs
Publication statusPublished - 1997 Sep

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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