Growth of epitaxial strontium barium niobate thin films by solid source metal-organic chemical vapor deposition

Myeongkyu Lee, Robert S. Feigelson

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

Strontium barium niobate (SrxBa1-xNb2O6) thin films have been epitaxially grown on (0 0 1)MgO, (1 1 0)MgO and (0 0 1)Sr0.75Ba0.25Nb2O6 substrates by solid source metal-organic chemical vapor deposition. Films became amorphous when the substrate temperature was below 535 °C. The crystallinity of the film improved approximately with decreasing growth rate. Film compositions could be controlled by varying source compositions. Single crystalline films were deposited on (0 0 1)Sr0.75Ba0.25Nb2O6 single crystal substrates while films grown on (0 0 1)MgO and (1 1 0)MgO substrates revealed four in-plane orientations. Waveguiding behavior was demonstrated for both TE and TM modes with the films grown on (0 0 1)MgO substrates. The measured refractive indices were in agreement with those of bulk crystal.

Original languageEnglish
Pages (from-to)220-228
Number of pages9
JournalJournal of Crystal Growth
Volume180
Issue number2
DOIs
Publication statusPublished - 1997 Sep

Bibliographical note

Funding Information:
This research was funded by the Defense Advanced Research Project Agency (DARPA) through the Center for Nonlinear Optical Materials (CNOM) Program at Stanford University. Facilities support was provided by the NSF/MRSEC Program through the Center for Materials Research at Stanford University. We wish to thank Z. Lu for helpful discussion, and J.S. Yeo for his help with the waveguiding measurements.

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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