Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition

Ji Yoon Park, Seungmin Yeo, Taehoon Cheon, Soo Hyun Kim, Min Kyu Kim, Hyungjun Kim, Tae Eun Hong, Do Joong Lee

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science