In this paper we extend our previous studies of μc-Si:H deposition on glass to plastic foils, aiming to produce bottom gate TFTs. In particular, we have obtained films with a crystalline fraction as high as 96% even at 150°C, as deduced from UV-visible ellipsometry and Raman spectroscopy measurements. Moreover, we have used glass coatedpolyimide substrates to process bottom gate TFTs. Our first results show that even on these substrates we can achieve a mobility of 0.4 cm2/V.s.
|Number of pages||3|
|Publication status||Published - 2005 Dec 1|
|Event||Second Americas Display Engineering and Applications Conference, ADEAC 2005 - Portland, OR, United States|
Duration: 2005 Oct 25 → 2005 Oct 27
|Other||Second Americas Display Engineering and Applications Conference, ADEAC 2005|
|Period||05/10/25 → 05/10/27|
All Science Journal Classification (ASJC) codes